METHOD FOR DETECTING EDGE ON TRANSPARENT SUBSTRATE, APPARATUS FOR DETECTING EDGE ON TRANSPARENT SUBSTRATE, AND PROCESSING APPARATUS
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Abstract
An apparatus for detecting an edge of a transparent substrate includes a light source provided on a rear side of the edge of the transparent substrate, a first polarizer provided between the transparent substrate and the light source and arranged to convert light from the light source to linearly polarized light, a light receiving unit provided on a front side of the edge of the transparent substrate, and a second polarizer provided between the transparent substrate and the light receiving unit, and having a polarization axis that is perpendicular or substantially perpendicular to a polarization axis of the first polarizer. The light receiving unit is configured to observe, through the second polarizer, the linearly polarized light that is converted by the first polarizer and is transmitted through the edge of the transparent substrate, the linearly polarized light that is converted by the first polarizer and passes outside the transparent substrate, and emitted light that is converted by the first polarizer, and is propagated through inside of the transparent substrate and emitted from a side surface of the edge of the transparent substrate.
22 Citations
16 Claims
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1-8. -8. (canceled)
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9. A method for detecting an edge of a transparent substrate having optical isotropy, comprising:
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directing linearly polarized light from a light source, converted by a first polarizer, to an edge of a rear surface of the transparent substrate; and observing the linearly polarized light that is transmitted through the edge of the transparent substrate, the linearly polarized light that passes outside the transparent substrate, and emitted light that is propagated through inside of the transparent substrate and emitted from a side surface of the edge of the transparent substrate, from a front side of the transparent substrate through a second polarizer having a polarization axis that is perpendicular or substantially perpendicular to a polarization axis of the first polarizer.
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10. An apparatus for detecting an edge of a transparent substrate having optical isotropy, comprising:
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a light source provided on a rear side of the edge of the transparent substrate; a first polarizer provided between the transparent substrate and the light source, and arranged to convert light from the light source to linearly polarized light; a light receiving unit provided on a front side of the edge of the transparent substrate; and a second polarizer provided between the transparent substrate and the light receiving unit, and having a polarization axis that is perpendicular or substantially perpendicular to a polarization axis of the first polarizer;
whereinthe light receiving unit is configured to observe, through the second polarizer, the linearly polarized light that is converted by the first polarizer and is transmitted through the edge of the transparent substrate, the linearly polarized light that is converted by the first polarizer and passes outside the transparent substrate, and emitted light that is converted by the first polarizer, and is propagated through inside of the transparent substrate and emitted from a side surface of the edge of the transparent substrate. - View Dependent Claims (11, 12)
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13. A processing apparatus for transferring and processing a transparent substrate having optical isotropy by a roll-to-roll method, comprising:
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a light source provided on a rear side of an edge of the transparent substrate; a first polarizer provided between the transparent substrate and the light source, and arranged to convert light from the light source to linearly polarized light; a light receiving unit provided on a front side of the edge of the transparent substrate; and a second polarizer provided between the transparent substrate and the light receiving unit, and having a polarization axis that is perpendicular or substantially perpendicular to a polarization axis of the first polarizer;
whereinthe light receiving unit is configured to detect the edge of the transparent substrate being transferred, by observing, through the second polarizer, the linearly polarized light that is converted by the first polarizer and is transmitted through the edge of the transparent substrate, the linearly polarized light that is converted by the first polarizer and passes outside the transparent substrate, and emitted light that is converted by the first polarizer, and is propagated through inside of the transparent substrate and emitted from a side surface of the edge of the transparent substrate. - View Dependent Claims (14, 15, 16)
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Specification