Complex type microscopic device
First Claim
1. A complex type microscopic device comprising:
- a slider unit which moves, along a horizontal plane, a stage on which a sample is placed;
an optical microscope which has an optical axis parallel to a vertical direction in an area in which the stage is moved by the slider unit;
a scanning electron microscope which has an electron axis intersecting with the optical axis on the stage;
an optical measurement/observation unit having a magnification intermediate between magnifications of the scanning electron microscope and the optical microscope, and co-using an objective lens with the optical microscope;
a control unit which generates an image from image data on the sample obtained with each of the optical measurement/observation unit, the scanning electron microscope, and the optical microscope, and which controls the slider unit to move the stage; and
a display unit which includes a display screen on which the image is displayed under control of the control unit, wherein;
during display of a low-magnification optical microscopic image obtained with the optical microscope on the display screen, the control unit controls the display unit to display, on the low-magnification optical microscopic image, a first representation to designate an area to be observed at the magnification of the optical measurement/observation unit; and
during display of a high-magnification optical microscopic image obtained with the optical measurement/observation unit on the display screen, the control unit controls the display unit to display, on the high-magnification optical microscopic image, a second representation to designate an area to be observed at the magnification of the scanning electron microscope.
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Accused Products
Abstract
A complex type microscopic device includes a slider unit moving a stage, an optical microscope, a scanning electron microscope with an electron axis intersecting with an optical axis of the optical microscope, an optical measurement/observation unit having a magnification between those of the scanning electron microscope and the optical microscope and co-using an objective lens with the optical microscope, and a control unit controlling the entire device, and a display unit having a display screen. During display of a low-magnification optical microscopic image, the control unit controls the display unit to display, on the image, a representation to designate an area to be observed at a magnification of the optical measurement/observation unit, and to display, on the image, another representation to designate an area to be observed at a magnification of the scanning electron microscope during display of a high-magnification optical microscopic image.
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Citations
9 Claims
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1. A complex type microscopic device comprising:
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a slider unit which moves, along a horizontal plane, a stage on which a sample is placed; an optical microscope which has an optical axis parallel to a vertical direction in an area in which the stage is moved by the slider unit; a scanning electron microscope which has an electron axis intersecting with the optical axis on the stage; an optical measurement/observation unit having a magnification intermediate between magnifications of the scanning electron microscope and the optical microscope, and co-using an objective lens with the optical microscope; a control unit which generates an image from image data on the sample obtained with each of the optical measurement/observation unit, the scanning electron microscope, and the optical microscope, and which controls the slider unit to move the stage; and a display unit which includes a display screen on which the image is displayed under control of the control unit, wherein; during display of a low-magnification optical microscopic image obtained with the optical microscope on the display screen, the control unit controls the display unit to display, on the low-magnification optical microscopic image, a first representation to designate an area to be observed at the magnification of the optical measurement/observation unit; and during display of a high-magnification optical microscopic image obtained with the optical measurement/observation unit on the display screen, the control unit controls the display unit to display, on the high-magnification optical microscopic image, a second representation to designate an area to be observed at the magnification of the scanning electron microscope. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification