PIEZOELECTRIC TRANSDUCER

• US 20100094105A1
• Filed: 10/13/2009
• Published: 04/15/2010
• Est. Priority Date: 12/30/1997
• Status: Active Grant

• Current Assignee: Remon Medical Technologies Ltd. (Boston Scientific Corporation)
• Original Assignee: Remon Medical Technologies Ltd. (Boston Scientific Corporation)
• Inventors: Porat, Yariv, Tsaliah, Yoseph, Doron, Eyal
• Granted Patent: US 7,948,148 B2
• Time in Patent Office: Days
• US Class Current: 600/309
• CPC Class Codes: A61K 9/0009 involving or responsive to electricity, magnetism or acoustic waves; Galenical aspects of sonophoresis, iontophoresis, electroporation or electroosmosis microelectromechanical systems A61K9/0097
• CPC Class Codes: A61K 9/0024 Solid, semi-solid or solidifying implants, which are implanted or injected in body tissue compositions for intravenous administration, normal injectable solutions or dispersions for, e.g. subcutaneous administration A61K9/0019; brain implants A61K9/0085; (coated) prostheses, catheters or stents A61L
• CPC Class Codes: A61K 9/0097 Micromachined devices; Microelectromechanical systems [MEMS]; Devices obtained by lithographic treatment of silicon; Devices comprising chips intradermal microneedle arrays A61K9/0021; MEMS in general B81B7/02
• CPC Class Codes: H10N 30/80 Constructional details

Abstract

A miniature piezoelectric transducer element is provided, comprising; (a) a cell element having a cavity; (b) a flexible piezoelectric layer attached to the cell member, the piezoelectric layer having an external surface and an internal surface, the piezoelectric layer featuring such dimensions so as to enable fluctuations thereof at its resonance frequency upon impinging of an external acoustic wave; and (c) a first electrode attached to the external surface and a second electrode attached to the internal surface of the piezoelectric layer. At least one of the electrodes may be specifically shaped so as to provide a maximal electrical output, wherein the electrical output may be current, voltage or power. A preferred shape of the electrodes includes two cores interconnected by a connecting member. The transducer element may function as a transmitter.

Claims

1. A transducer element, comprising:

a cell member including at least one cavity;

a piezoelectric layer coupled to a periphery of the cell member so as to isolate the cavity from an external fluid medium, the piezoelectric layer having a concave shape and including an external surface and an internal surface, wherein a central portion of the piezoelectric layer is freely suspended over the cavity; and

a first electrode attached to the external surface of the piezoelectric layer and a second electrode attached to the internal surface of the piezoelectric layer, the first and second electrodes coupled to an electrical circuit.

2. The transducer element of claim 1, wherein the cavity is etched into a substrate.

3. The transducer element of claim 2, wherein the substrate includes an electrically insulating layer and an electrically conductive layer.

4. The transducer element of claim 1, wherein the cavity is circular in cross-section.

5. The transducer element of claim 1, wherein the cavity is hexagonal in cross-section.

6. The transducer element of claim 1, wherein the at least one cavity includes a plurality of cavities covered by a single piezoelectric layer, the plurality of cavities forming a matrix of transducing cell members.

7. The transducer element of claim 1, wherein the cavity includes a gas.

8. The transducer element of claim 7, wherein the pressure of the gas is lower than the pressure of the external fluid medium.

9. The transducer element of claim 1, wherein the cavity has an acoustic impedance lower than an acoustic impedance of the external fluid medium.

10. The transducer element of claim 1, wherein the piezoelectric layer comprises a PVDF material.

11. The transducer element of claim 1, wherein at least one of the first and second electrodes comprises two electrode portions interconnected by a connecting member.

12. The transducer element of claim 11, wherein the two electrode portions are symmetrically located on each side of the central portion of the piezoelectric layer.

13. The transducer element of claim 1, wherein at least one of the first and second electrodes covers only a portion of a surface of the piezoelectric layer.

14. The transducer element of claim 1, wherein the first and second electrodes cover a surface of the piezoelectric layer at a location spaced apart from the central portion and periphery of the piezoelectric layer.

15. The transducer element of claim 1, wherein the thickness of the piezoelectric layer is about 9 to 28 μ

m.

16. The transducer element of claim 1, wherein the radius of the cavity is about 200 μ

m.

17. The transducer element of claim 1, wherein the piezoelectric layer is configured to fluctuate in and out of the cavity at its resonance frequency upon impingement of an external acoustic field transmitted through the external fluid medium, the resonance frequency determined by the physical dimensions of the cavity and the piezoelectric layer, wherein the wavelength of the acoustic field is substantially larger than said dimensions.

18. The transducer element of claim 1, wherein the transducer element is a transmitter.

19. A biosensor for implantation within a body, the biosensor comprising:

a sensor; and

a transducer element coupled to the sensor, the transducer element including;

a cell member including at least one cavity;

a piezoelectric layer coupled to a periphery of the cell member so as to isolate the cavity from an external fluid medium, the piezoelectric layer having a concave shape and including an external surface and an internal surface, wherein a central portion of the piezoelectric layer is freely suspended over the cavity; and

a first electrode attached to the external surface of the piezoelectric layer and a second electrode attached to the internal surface of the piezoelectric layer, the first and second electrodes coupled to an electrical circuit.

20. A system for transmitting information within a body, the system comprising:

a sensor;

a transducer element coupled to the sensor, the transducer element including;

a cell member including at least one cavity;

a piezoelectric layer coupled to a periphery of the cell member so as to isolate the cavity from an external fluid medium, the piezoelectric layer having a concave shape and including an external surface and an internal surface, wherein a central portion of the piezoelectric layer is freely suspended over the cavity; and

a first electrode attached to the external surface of the piezoelectric layer and a second electrode attached to the internal surface of the piezoelectric layer, the first and second electrodes coupled to an electrical circuit; and

a remote receiver configured to receive an acoustic wave transmitted by the transducer element.