SLEEVE CONE QUALITY MEASUREMENT SYSTEM AND METHOD
First Claim
1. A metrology system comprising:
- a rotary stage;
at least one holding fixture, each for holding at least one conical sample;
a plurality of differently sized measurement devices positioned adjacent to the rotary stage for interfitting, in a measuring state, with the samples to obtain data useful in determining one or more characteristics of the samples, wherein the rotary stage is free to rotate when the measuring devices are in a non-measuring state; and
a processor in communication with the measurement devices, and operable to use the data from the measurement devices for calculating a cone angle, a cone straightness, and a cone quality of each sample.
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Abstract
A metrology system for measuring a cone angle, a cone straightness, and a cone quality of a sample and method of using the metrology system are disclosed. The system includes a rotary stage, one or more workpiece fixtures that hold the samples in the rotary stage, and a number of different sized measurement devices. The measuring devices are positioned next to the rotary stage and measure the samples using contact. The rotary stage is free to rotate when the measuring devices are in a non-measuring state. The invention also includes a processor that collects data from the measurement devices and calculates the cone angle, the cone straightness, and the cone quality of each sample based on the data.
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Citations
22 Claims
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1. A metrology system comprising:
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a rotary stage; at least one holding fixture, each for holding at least one conical sample; a plurality of differently sized measurement devices positioned adjacent to the rotary stage for interfitting, in a measuring state, with the samples to obtain data useful in determining one or more characteristics of the samples, wherein the rotary stage is free to rotate when the measuring devices are in a non-measuring state; and a processor in communication with the measurement devices, and operable to use the data from the measurement devices for calculating a cone angle, a cone straightness, and a cone quality of each sample. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A metrology method, comprising the steps of:
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(a) placing at least one sample into at least one sample slot, wherein each sample slot is arranged within a rotary stage; (b) extending a measuring device to contact with each sample and recording an amount of extension of each measuring device, wherein there are a plurality of different sized measuring devices; (c) retracting the measuring devices; (d) rotating the rotary stage to a subsequent position wherein at least one sample slot is aligned with another measuring device; (e) repeating steps (b) through (d) until each sample is measured by each measuring device; (f) compiling a data set of data from the recorded extension of each measuring device for each sample; and (g) calculating a cone angle, cone straightness, and cone quality of each sample based on the compiled set of data. - View Dependent Claims (19, 20, 21, 22)
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Specification