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METHOD FOR ADJUSTING RESONANCE FREQUENCIES OF A VIBRATING MICROELECTROMECHANICAL DEVICE

  • US 20100095739A1
  • Filed: 10/21/2008
  • Published: 04/22/2010
  • Est. Priority Date: 10/21/2008
  • Status: Active Grant
First Claim
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1. A method for adjusting the resonant frequencies of a vibrating mass comprising the steps of:

  • patterning a surface of a device layer of the vibrating mass with a mask;

    etching the vibrating mass to define a structure of the vibrating mass;

    determining a first set of resonant frequencies of the vibrating mass;

    determining a mass removal amount of the vibrating mass and a mass removal location of the vibrating mass to obtain a second set of resonant frequencies of the vibrating mass;

    removing the mask at the mass removal location; and

    etching the vibrating mass to remove the mass removal amount of the vibrating mass at the mass removal location of the vibrating mass.

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