Micromachined torsional gyroscope with anti-phase linear sense transduction
First Claim
1. A micromachined gyroscope, comprising:
- a pair of masses disposed generally in a plane and driven for out-of-plane torsional oscillation about a pair of drive axes in the plane, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for in-plane torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, a link connecting the two masses together for movement of equal amplitude and opposite phase both about the drive axes and about the sense axes, transducers having input electrodes constrained for linear in-plane movement relative to stationary electrodes, and link beams interconnecting the masses and the input electrodes so that torsional movement of the masses about the sense axes produces changes in capacitance between the input electrodes and the stationary electrodes.
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Abstract
Micromachined gyroscope having a pair of masses disposed generally in a plane and driven for out-of-plane torsional oscillation about a pair of drive axes in the plane for sensing rotation about an input axis perpendicular to the drive axes. The masses are mounted for in-plane torsional movement about sense axes perpendicular to the drive axes and the input axis in response to Coriolis forces produced by rotation of the masses about the input axis. A link connects the two masses together for movement of equal amplitude and opposite phase both about the drive axes and about the sense axes. The masses are connected to transducers having input electrodes constrained for linear in-plane movement relative to stationary electrodes, with that torsional movement of the masses about the sense axes producing changes in capacitance between the input electrodes and the stationary electrodes.
27 Citations
19 Claims
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1. A micromachined gyroscope, comprising:
- a pair of masses disposed generally in a plane and driven for out-of-plane torsional oscillation about a pair of drive axes in the plane, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for in-plane torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, a link connecting the two masses together for movement of equal amplitude and opposite phase both about the drive axes and about the sense axes, transducers having input electrodes constrained for linear in-plane movement relative to stationary electrodes, and link beams interconnecting the masses and the input electrodes so that torsional movement of the masses about the sense axes produces changes in capacitance between the input electrodes and the stationary electrodes.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A micromachined gyroscope, comprising:
- first and second masses disposed side-by-side in a plane, beams suspending the masses from anchors located centrally of the masses for torsional out-of-plane movement about a pair of drive axes in the plane and for torsional in-plane movement about sense axes perpendicular to the plane, means connecting the two masses together for movement of equal amplitude and opposite phase both about the drive axes and about the sense axes, with Coriolis forces produced by rotation of the masses about an input axis producing torsional movement of the masses about the sense axes, first and second transducers positioned on opposite sides of the first mass, third and fourth transducers positioned on opposite sides of the second mass, link beams interconnecting the masses and the transducers so that torsional movement of the masses about the sense axes produces changes in capacitance in the transducers corresponding to rotation of the masses about the input axis.
- View Dependent Claims (11, 12)
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13. A micromachined gyroscope, comprising:
- a pair of masses disposed side-by-side in a plane, beams suspending the masses from anchors located centrally of the masses for torsional out-of-plane movement about a pair of drive axes in the plane and for torsional in-plane movement about sense axes perpendicular to the plane, means connecting the two masses together for movement of equal amplitude and opposite phase both about the drive axes and about the sense axes, with Coriolis forces produced by rotation of the masses about an input axis producing torsional movement of the masses about the sense axes, transducers positioned on opposite sides of each of the masses having input plates that extend toward each other from opposite sides of peripheral shuttle frames and stationary plates disposed within the frames and interleaved with the input plates, flexible beams constraining the shuttle frames for linear in-plane movement in directions perpendicular to the plates, and link beams interconnecting the masses and the shuttle frames so that torsional movement of the masses about the sense axes produces changes in capacitance between the input plates and the stationary plates.
- View Dependent Claims (14, 15)
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16. A micromachined gyroscope, comprising:
- a pair of masses disposed side-by-side in a plane, beams suspending the masses from anchors located centrally of the masses for torsional out-of-plane movement about a pair of drive axes in the plane and for torsional in-plane movement about sense axes perpendicular to the plane, means connecting the two masses together for movement of equal amplitude and opposite phase both about the drive axes and about the sense axes, with Coriolis forces produced by rotation of the masses about an input axis producing torsional movement of the masses about the sense axes, transducers positioned on opposite sides of each of the masses having stationary plates extending toward each other from opposite sides of peripheral frames and input plates which are mounted on shuttles within the frames and interleaved with the stationary plates, flexible beams constraining the shuttles for linear in-plane movement in directions perpendicular to the plates, and link beams interconnecting the masses and the shuttles so that torsional movement of the masses about the sense axes produces changes in capacitance between the input plates and the stationary plates.
- View Dependent Claims (17, 18, 19)
Specification