Angular Velocity Measuring Device
First Claim
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1. An angular velocity measuring device comprising:
- first and second oscillators elastically supported on a substrate;
an elastic connecting beam elastically connecting the first and the second oscillator; and
an oscillating means for oscillating the first and the second oscillator for differential oscillation;
wherein a viscous force generating means for suppressing in-phase oscillation of the first and the second oscillator is incorporated into the elastic connecting beam.
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Abstract
Disclosed herein is an angular velocity measuring device including: first and second oscillators elastically supported on a substrate; an elastic connecting beam elastically connecting the first and the second oscillator; and an oscillating means for oscillating the first and the second oscillator for differential oscillation, wherein a viscous force generating means for suppressing in-phase oscillation of the first and the second oscillator is incorporated into the elastic connecting beam.
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Citations
13 Claims
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1. An angular velocity measuring device comprising:
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first and second oscillators elastically supported on a substrate; an elastic connecting beam elastically connecting the first and the second oscillator; and an oscillating means for oscillating the first and the second oscillator for differential oscillation; wherein a viscous force generating means for suppressing in-phase oscillation of the first and the second oscillator is incorporated into the elastic connecting beam. - View Dependent Claims (2, 3, 4, 5, 6, 9, 10, 11, 12, 13)
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7. An angular velocity measuring device comprising:
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first and second oscillators elastically supported on a substrate; an elastic connecting beam elastically connecting the first and the second oscillator; and first and second electrostatic generating means for exerting electrostatic force on the first and the second oscillator to oscillate the first and the second oscillator for differential oscillation; wherein the first oscillator is connected mechanically to the first electrostatic force generating means by a first connecting beam such that the first oscillator has a rigidity with respect to oscillating directions higher than a rigidity with respect to directions parallel to the substrate in which the first oscillator oscillates, the second oscillator is connected mechanically to the second electrostatic force generating means by a second connecting beam such that the second oscillator has a rigidity with respect to oscillating directions higher than a rigidity with respect to directions parallel to the substrate in which the second oscillator oscillates, and the first connecting beam, the second connecting beam, a center of gravity of the first oscillator, and a center of gravity of the second oscillator are aligned. - View Dependent Claims (8)
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Specification