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FREQUENCY MODULATED MICRO GYRO

  • US 20100095770A1
  • Filed: 10/16/2009
  • Published: 04/22/2010
  • Est. Priority Date: 10/21/2008
  • Status: Active Grant
First Claim
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1. A device for measuring angular rate, comprising:

  • a proof mass resonator; and

    at least one detector resonator coupled to the proof mass resonator, the at least one detector resonator being oscillated at a first resonant frequency and being altered to oscillate at a second resonant frequency in response to a resultant force produced by rotating the proof mass resonator at an angular rate.

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