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MINIATURIZED, LOW POWER FGMOSFET RADIATION SENSOR AND WIRELESS DOSIMETER SYSTEM

  • US 20100096556A1
  • Filed: 10/16/2009
  • Published: 04/22/2010
  • Est. Priority Date: 10/16/2008
  • Status: Active Grant
First Claim
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1. A FGMOSFET radiation sensor comprising:

  • a substrate comprising a device well;

    a source and a drain, separated by a channel region, defined in the device well;

    a floating gate extending over the channel region and separated therefrom by a gate dielectric layer, and an extension of the floating gate extending over a field dielectric layer adjacent the device well;

    a charge injector means defined in the substrate underlying another part of the floating gate and separated from the floating gate by a gate dielectric layer; and

    another dielectric layer and an electrostatic shielding layer extending over the floating gate.

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