ENDEFFECTORS FOR HANDLING SEMICONDUCTOR WAFERS
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Accused Products
Abstract
Various endeffector designs are disclosed for handling semiconductor wafers. For instance, an endeffector for handling wafers at a relatively low temperature is disclosed along with an endeffector for handling wafers at a relatively high temperature. Both endeffectors include uniquely designed support members that are configured to only contact a wafer at the wafer'"'"'s edge. The endeffectors may also include a wafer detection system. The endeffector for handling wafers at relatively low temperatures may also include a pushing device that is used not only to position a wafer but to hold a wafer on the endeffector during acceleration or deceleration of the endeffector caused by a robot arm attached to the endeffector. As designed, the endeffectors may have a very slim profile making the endeffectors easily maneuverable.
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Citations
86 Claims
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1-59. -59. (canceled)
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60. An endeffector for handling semiconductor wafers comprising:
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a base member having a proximal end and a distal end; a plurality of support members located on the base member for contacting and supporting a wafer placed on the endeffector, the support members defining a wafer receiving area therebetween; and a plurality of emergency pins located on the base member in a center area located between the proximal end and the distal end of the base member, each of the emergency pins having a height less than a height defined by the support members, the emergency pins being located on the base member so as to prevent a semiconductor wafer supported on the support members from contacting other portions of the base member. - View Dependent Claims (61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85)
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86-100. -100. (canceled)
Specification