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METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

  • US 20100099216A1
  • Filed: 10/16/2009
  • Published: 04/22/2010
  • Est. Priority Date: 10/22/2008
  • Status: Active Grant
First Claim
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1. A method for manufacturing a semiconductor device, comprising the steps of:

  • forming a gate electrode over a substrate;

    forming a gate insulating layer over the gate electrode;

    forming an oxide semiconductor layer over the gate insulating layer;

    processing the oxide semiconductor layer by wet etching to form an island-shaped oxide semiconductor layer;

    forming a conductive layer over the island-shaped oxide semiconductor layer;

    processing the conductive layer by first dry etching to form a source electrode and a drain electrode; and

    removing a part of the island-shaped oxide semiconductor layer by second dry etching to form a recessed portion in the island-shaped oxide semiconductor layer.

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