Large-Area Transparent Electroconductive Film and Method of Making the Same

• US 20100101642A1
• Filed: 02/25/2008
• Published: 04/29/2010
• Est. Priority Date: 03/23/2007
• Status: Abandoned Application

• Current Assignee: Shoji Kaneko, SPD Laboratory, Inc.
• Original Assignee: SPD Laboratory, Inc.
• Inventors: Kaneko, Shoji, Horikawa, Nobuyuki, Kawasaki, Shunji
• Application Number:
  US12/531,768
• Publication Number:
  US 20100101642A1
• Time in Patent Office: Days
• US Class Current: 136/256
• CPC Class Codes: C03C 17/23 Oxides C03C17/02 takes precedence
• CPC Class Codes: C03C 2217/211 SnO2
• CPC Class Codes: C03C 2217/241 with halides
• CPC Class Codes: C03C 2217/94 Transparent conductive oxide layers [TCO] being part of a multilayer coating
• CPC Class Codes: C03C 2218/112 by spraying
• CPC Class Codes: C23C 16/407 of zinc, germanium, cadmium, indium, tin, thallium or bismuth
• CPC Class Codes: C23C 16/545 for coating elongated substrates
• CPC Class Codes: H01L 31/022466 made of transparent conductive layers, e.g. TCO, ITO layers
• CPC Class Codes: H01L 31/1884 Manufacture of transparent electrodes, e.g. TCO, ITO
• CPC Class Codes: Y02E 10/542 Dye sensitized solar cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

A large-area transparent electroconductive film having a high visible light transmittance, a suitable haze and a low sheet resistance and having an excellent in uniformity on a film surface and which does not require special crystal orientation. The large-area transparent electroconductive film according to the present invention is characterized in that the film is a fluorine-doped tin oxide film having a film thickness of 0.3 to 1 μm, an average light transmittance is 70 to 90% in a wavelength range of 400 to 800 nm, a haze is 2 to 20% and a sheet resistance is 2 to 15 Ω/□.

Claims

1. A large-area transparent electroconductive film characterized in that the film is a fluorine-doped tin oxide film having a film thickness of 0.3 to 1 μ

m, an average light transmittance is 70 to 90% in a wavelength range of 400 to 800 nm, a haze is 2 to 20% and a sheet resistance is 2 to 15 Ω

/□

.

2. The large-area transparent electroconductive film according to claim 1, wherein the average light transmittance is 75 to 85% in a wavelength range of 400 to 800 nm, haze is 3 to 15% and sheet resistance is 3 to 10 Ω

/□

.

3. The large-area transparent electroconductive film according to claim 1, wherein variability of the average light transmittance is within ±

3% and variability of the sheet resistance is within ±

10% on a film surface.

4. The large-area transparent electroconductive film according to claim 1, wherein an area of the transparent electroconductive film is 100 to 10000 cm².

5. The large-area transparent electroconductive film according to claim 1 used as a solar light transmittance film of a solar cell.

6. A method of making a large-area electroconductive film characterized in that, in a spray pyrolysis method in which a material solution is sprayed on a surface of a heated substrate placed in a horizontal direction, the material solution is sprayed on the substrate while moving a spraying nozzle in any direction on an X-Y axis.