ELECTRICAL MICROVALVE AND METHOD OF MANUFACTURING THEREOF
First Claim
1. A microvalve for a microchannel, the microvalve comprising:
- a first electrode affixed to a portion of the microchannel;
a second electrode located within proximity of the microchannel and substantially aligned with the first electrode, the second electrode forming a membrane demonstrating substantially no resilience; and
a lid adapted to support the membrane,whereby upon electrical actuation of the first and second electrodes, the second electrode is forced towards the first electrode within the microchannel so as to obstruct the microchannel.
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Accused Products
Abstract
The present invention relates to a microvalve for controlling a fluid flow in a microchannel, to a microfluidic circuit using the microvalve, and to a manufacturing method thereof. The microvalve has a first electrode located on a portion of the microchannel, a second electrode over the microchannel and substantially aligned with the first electrode forming a membrane with substantially no resilience. In function, upon application of an electric force on the first and second electrodes, the second electrode draws nearer the first electrode, thus obstructing the microchannel. The microfluidic circuit comprises multiple microchannels and at least one microvalve affixed to one of the multiple microchannels, wherein the at least one microvalve is adapted to indirectly actuate a flexible valve adapted to regulate a flow of fluid in another one of a multiplicity of microchannels.
48 Citations
21 Claims
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1. A microvalve for a microchannel, the microvalve comprising:
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a first electrode affixed to a portion of the microchannel; a second electrode located within proximity of the microchannel and substantially aligned with the first electrode, the second electrode forming a membrane demonstrating substantially no resilience; and a lid adapted to support the membrane, whereby upon electrical actuation of the first and second electrodes, the second electrode is forced towards the first electrode within the microchannel so as to obstruct the microchannel. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 20, 21)
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15. A microvalve for a microchannel, the microvalve comprising:
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a first electrode affixed to a base of the microchannel; a second electrode located within proximity of the microchannel and substantially aligned with the first electrode and forming a membrane demonstrating substantially no resilience; a third electrode affixed to a cover portion of the microchannel and substantially aligned with the first and second electrode; dielectric substance located between the first and second electrode and the second and third electrode; and whereby upon electrical actuation of the first and second electrodes, the second electrode is forced towards the first electrode within the microchannel so as to obstruct the microchannel, and upon electrical actuation of the second and third electrodes, the second electrode is forced towards the third electrode within the microchannel so as to open the microchannel.
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16. A method of manufacturing a microfluidic circuit, the method comprising steps of:
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(a) etching a microchannel in a base that could be glass or ceramic or any other substance having similar properties; (b) affixing a first electrode in a microchannel; (c) applying a dielectric substance covering at least a portion of the microchannel over the first electrode; and (d) affixing a second electrode over the dielectric substance in such a manner that the second electrode is substantially aligned with the first electrode. - View Dependent Claims (17, 18, 19)
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Specification