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ELECTRICAL MICROVALVE AND METHOD OF MANUFACTURING THEREOF

  • US 20100101670A1
  • Filed: 11/05/2007
  • Published: 04/29/2010
  • Est. Priority Date: 11/03/2006
  • Status: Abandoned Application
First Claim
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1. A microvalve for a microchannel, the microvalve comprising:

  • a first electrode affixed to a portion of the microchannel;

    a second electrode located within proximity of the microchannel and substantially aligned with the first electrode, the second electrode forming a membrane demonstrating substantially no resilience; and

    a lid adapted to support the membrane,whereby upon electrical actuation of the first and second electrodes, the second electrode is forced towards the first electrode within the microchannel so as to obstruct the microchannel.

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