SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
First Claim
1. A semiconductor device comprising:
- a first gate electrode over an insulating surface;
a first insulating layer over the first gate electrode;
a source electrode and a drain electrode over the first insulating layer;
an oxide semiconductor layer over the source electrode and the drain electrode;
a second insulating layer covering the oxide semiconductor layer; and
a second gate electrode over the second insulating layer,wherein the oxide semiconductor layer is formed over the first insulating layer and overlaps with the first gate electrode,wherein at least part of the oxide semiconductor layer is provided between the source electrode and the drain electrode, andwherein the second gate electrode overlaps with the oxide semiconductor layer and the first gate electrode.
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Accused Products
Abstract
As a display device has a higher definition, the number of pixels, gate lines, and signal lines are increased. When the number of the gate lines and the signal lines are increased, there occurs a problem that it is difficult to mount an IC chip including a driver circuit for driving the gate and signal lines by bonding or the like, whereby manufacturing cost is increased. A pixel portion and a driver circuit for driving the pixel portion are provided over the same substrate, and at least part of the driver circuit includes a thin film transistor using an oxide semiconductor interposed between gate electrodes provided above and below the oxide semiconductor. The pixel portion and the driver portion are provided over the same substrate, whereby manufacturing cost can be reduced.
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Citations
14 Claims
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1. A semiconductor device comprising:
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a first gate electrode over an insulating surface; a first insulating layer over the first gate electrode; a source electrode and a drain electrode over the first insulating layer; an oxide semiconductor layer over the source electrode and the drain electrode; a second insulating layer covering the oxide semiconductor layer; and a second gate electrode over the second insulating layer, wherein the oxide semiconductor layer is formed over the first insulating layer and overlaps with the first gate electrode, wherein at least part of the oxide semiconductor layer is provided between the source electrode and the drain electrode, and wherein the second gate electrode overlaps with the oxide semiconductor layer and the first gate electrode. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A semiconductor device comprising:
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a pixel portion and a driver circuit, wherein the pixel portion includes at least a first thin film transistor having a first oxide semiconductor layer, wherein the driver circuit includes at least an EDMOS circuit in which a second thin film transistor having a second oxide semiconductor layer and a third thin film transistor having a third oxide semiconductor layer are included, wherein the third thin film transistor includes a first gate electrode below the third oxide semiconductor layer and a second gate electrode above the third oxide semiconductor layer, and wherein at least part of the third oxide semiconductor layer is provided between a source electrode and a drain electrode, and the second gate electrode overlaps with the third oxide semiconductor layer and the first gate electrode. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A method for manufacturing a semiconductor device, comprising the steps of:
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forming a first gate electrode over an insulating surface; forming a first insulating layer over the first gate electrode; forming a source electrode and a drain electrode over the first gate insulating layer; performing plasma treatment on the first insulating layer, the source electrode, and the drain electrode; forming an oxide semiconductor layer over the source electrode and the drain electrode; forming a second insulating layer covering the oxide semiconductor layer; and forming a second gate electrode over the second insulating layer. - View Dependent Claims (14)
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Specification