VAPOR DEPOSITION METHOD FOR TERNARY COMPOUNDS
First Claim
1. A method for forming a titanium aluminum nitride material on a substrate surface, comprising:
- exposing a substrate sequentially to a titanium precursor gas and a nitrogen plasma to form a titanium nitride layer on the substrate during a plasma enhanced atomic layer deposition process;
exposing the titanium nitride layer to a plasma during a treatment process;
exposing the titanium nitride layer to an aluminum precursor gas while depositing an aluminum layer thereon during a vapor deposition process; and
repeating sequentially the plasma enhanced atomic layer deposition process, the treatment process, and the vapor deposition process to form the titanium aluminum nitride material from the titanium nitride layer and the aluminum layer.
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Abstract
Embodiments provide a method for depositing or forming titanium aluminum nitride materials during a vapor deposition process, such as atomic layer deposition (ALD) or plasma-enhanced ALD (PE-ALD). In some embodiments, a titanium aluminum nitride material is formed by sequentially exposing a substrate to a titanium precursor and a nitrogen plasma to form a titanium nitride layer, exposing the titanium nitride layer to a plasma treatment process, and exposing the titanium nitride layer to an aluminum precursor while depositing an aluminum layer thereon. The process may be repeated multiple times to deposit a plurality of titanium nitride and aluminum layers. Subsequently, the substrate may be annealed to form the titanium aluminum nitride material from the plurality of layers. In other embodiments, the titanium aluminum nitride material may be formed by sequentially exposing the substrate to the nitrogen plasma and a deposition gas which contains the titanium and aluminum precursors.
531 Citations
25 Claims
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1. A method for forming a titanium aluminum nitride material on a substrate surface, comprising:
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exposing a substrate sequentially to a titanium precursor gas and a nitrogen plasma to form a titanium nitride layer on the substrate during a plasma enhanced atomic layer deposition process; exposing the titanium nitride layer to a plasma during a treatment process; exposing the titanium nitride layer to an aluminum precursor gas while depositing an aluminum layer thereon during a vapor deposition process; and repeating sequentially the plasma enhanced atomic layer deposition process, the treatment process, and the vapor deposition process to form the titanium aluminum nitride material from the titanium nitride layer and the aluminum layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method for forming a titanium aluminum nitride material on a substrate surface, comprising:
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exposing a substrate sequentially to a titanium precursor gas and a nitrogen precursor while forming a first titanium nitride layer thereon; exposing the first titanium nitride layer to a plasma during a treatment process; exposing the first titanium nitride layer to an aluminum precursor gas while depositing a first aluminum layer thereon; exposing the substrate sequentially to the titanium precursor gas and the nitrogen precursor while forming a second titanium nitride layer on the first aluminum layer; exposing the second titanium nitride layer to the plasma during the treatment process; and exposing the second titanium nitride layer to the aluminum precursor gas while depositing a second aluminum layer thereon.
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20. A method for forming a titanium aluminum nitride material on a substrate surface, comprising:
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exposing a substrate sequentially to a titanium precursor gas and a nitrogen precursor while forming a first titanium nitride layer thereon; exposing the first titanium nitride layer to a first plasma during a first treatment process; exposing the first titanium nitride layer to an aluminum precursor gas while depositing a first aluminum layer thereon; exposing the first aluminum layer to a second plasma during a second treatment process; exposing the substrate sequentially to the titanium precursor gas and the nitrogen precursor while forming a second titanium nitride layer on the first aluminum layer; exposing the second titanium nitride layer to the first plasma during the first treatment process; exposing the second titanium nitride layer to the aluminum precursor gas while depositing a second aluminum layer thereon; and exposing the second aluminum layer to the second plasma during the second treatment process.
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21. A method for forming a titanium aluminum nitride material on a substrate surface, comprising:
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exposing a substrate to a deposition gas comprising a titanium precursor and an aluminum precursor while forming an absorbed layer thereon; exposing the absorbed layer to a nitrogen plasma while forming a titanium aluminum nitride layer on the substrate; and repeating sequential exposures of the deposition gas and the nitrogen plasma to form a plurality of titanium aluminum nitride layers on the substrate.
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22. A dynamic random access memory (DRAM) capacitor, comprising:
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a bottom electrode comprising titanium aluminum nitride and disposed over a contact surface; a high-k oxide layer disposed over the bottom electrode; and a top electrode comprising titanium aluminum nitride and disposed over the high-k oxide layer. - View Dependent Claims (23, 24, 25)
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Specification