Multi-MEMS Single Package MEMS Device

• US 20100103389A1
• Filed: 10/28/2008
• Published: 04/29/2010
• Est. Priority Date: 10/28/2008
• Status: Abandoned Application

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: McVea, Kenneth Brian, Sawyers, Bryce Daniel
• Application Number:
  US12/260,002
• Publication Number:
  US 20100103389A1
• Time in Patent Office: Days
• US Class Current: 353/99
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 7/0077 Other packages not provided for in groups B81B7/0035 - B81B7/0074
• CPC Class Codes: G03B 21/28 Reflectors in projection beam in illumination beam G03B21/2066
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A system and method for packaging multiple MEMS devices is disclosed. A preferred embodiment comprises two or more MEMS devices, such as DMD devices, packaged together into a single package. The MEMS devices can be either on a single substrate or else on multiple substrates, and may be aligned together or not aligned together depending upon the desired orientation of the MEMS devices.

Claims

1. A microelectromechanical system (MEMS) comprising:

a single package; and

a plurality of MEMS devices located within the single package, the plurality of MEMS devices separated from each other by at least one area that contains no MEMS devices.

2. The MEMS of claim 1, wherein the plurality of MEMS devices are located on a single MEMS substrate.

3. The MEMS of claim 1, wherein the plurality of MEMS devices are located on separate MEMS substrates.

4. The MEMS of claim 1, wherein the plurality of MEMS devices consists of three MEMS devices.

5. The MEMS of claim 4, wherein each of the three MEMS devices is situated to reflect a different color of light.

6. The MEMS of claim 1, wherein the plurality of MEMS devices are configured in a portrait configuration.

7. The MEMS of claim 1, wherein the plurality of MEMS devices are configured in a diamond configuration.

8. A digital micromirror device comprising:

a first array of micromirrors;

a second array of micromirrors separated from the first array of micromirrors; and

a package surrounding the first array of micromirrors and the second array of micromirrors, the package comprising a hermetically sealed first surface and a light transmissive second surface to allow light to impinge the first array of micromirrors and the second array of micromirrors.

9. The digital micromirror device of claim 8, further comprising a third array of micromirrors, the third array of micromirrors being separated from the first array of micromirrors and the second array of micromirrors, wherein the package surrounds the third array of micromirrors.

10. The digital micromirror device of claim 8, wherein the first array of micromirrors and the second array of micromirrors are positioned to reflect different colors of light.

11. The digital micromirror device of claim 8, wherein the first array of micromirrors and the second array of micromirrors are arranged in a portrait configuration with respect to each other.

12. The digital micromirror device of claim 8, wherein the first array of micromirrors and the second array of micromirrors are located on a continuous substrate.

13. The digital micromirror device of claim 8, wherein the first array of micromirrors and the second array of micromirrors are located on separate substrates.

14. A projection system comprising:

a light source;

a first reflector positioned to direct light from the light source to a single package, the single package comprising a light-transmissive surface; and

a plurality of micromirror arrays located within the single package, each of the plurality of micromirror arrays being separated from adjoining micromirror arrays by an area containing no micromirrors arrays; and

a second reflector positioned to direct light reflected from the plurality of micromirror arrays to a screen.

15. The projection system of claim 14, wherein each of the plurality of micromirror arrays comprises a first number of pixels and the light reflected from the plurality of micromirror arrays to a screen comprises the first number of pixels.

16. The projection system of claim 14, wherein the plurality of micromirror arrays comprises at least three micromirror arrays.

17. The projection system of claim 14, wherein the light source comprises a plurality of light sources, each light source capable of emitting a different color of light, wherein each micromirror array is positioned to be illuminated by a separate color of light.

18. The projection system of claim 14, wherein the plurality of micromirror arrays are located on a single substrate.

19. The projection system of claim 14, wherein the plurality of micromirror arrays are located on separate substrates.

20. The projection system of claim 14, wherein the plurality of micromirror arrays have edges which do not fall on a line.