×

Multi-MEMS Single Package MEMS Device

  • US 20100103389A1
  • Filed: 10/28/2008
  • Published: 04/29/2010
  • Est. Priority Date: 10/28/2008
  • Status: Abandoned Application
First Claim
Patent Images

1. A microelectromechanical system (MEMS) comprising:

  • a single package; and

    a plurality of MEMS devices located within the single package, the plurality of MEMS devices separated from each other by at least one area that contains no MEMS devices.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×