COUNTER-BALANCED MEMS MIRROR WITH HIDDEN HINGE

• US 20100103494A1
• Filed: 01/05/2010
• Published: 04/29/2010
• Est. Priority Date: 01/15/2008
• Status: Active Grant

• Current Assignee: Lumentum Operations, LLC (Lumentum Holdings Inc.)
• Original Assignee: Viavi Solutions, Inc. (Lumentum Holdings Inc.)
• Inventors: MOIDU, Abdul Jaleel K.
• Granted Patent: US 8,274,722 B2
• Time in Patent Office: Days
• US Class Current: 359/225.100
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A multi-layer hidden hinge and actuator design for high fill factor biaxial MEMS mirror array for wavelength selective switches (WSS) based on a silicon-on-insulator (SOI) process with wafer bonding and coarsely aligned orthogonal vertical comb and/or parallel plate actuator. The present invention relates to a micro-mirror in a MEMS linear piano micro-mirror array comprising a micro-mirror layer, a hinge layer and an electrode/substrate layer. The structure is formed by fabricating the layers separately in SOI structure and then bonding them together.

Claims

1. A micro-electro-mechanical (MEMs) device comprising:

a substrate with first and second supports extending upwardly therefrom;

a tilting element pivotable about a first axis;

first hinges, defining the first axis, extending from opposite sides of the tilting element connected to the first and second supports;

a first ground electrode connected to the tilting element;

a pedestal extending upwardly from the tilting element;

a reflective body mounted on the pedestal;

a counter mass extending downwardly from the tilting element to counter balance the weight of the reflective body about the first axis; and

a first hot electrode mounted on the substrate for attracting the first ground electrode, thereby rotating the tilting element and the reflective body about the first axis.

2. The MEMs device according to claim 1, wherein the first ground electrode and the counter mass comprise a first layer;

wherein the tilting element and the first hinges comprise a second layer, parallel to the first layer; and

wherein the reflective body and the pedestal comprise a third layer, parallel to the first and second layers;

whereby the first ground electrode and the first hinges have thicknesses independent of each other.

3. The MEMs device according to claim 1, wherein the first hot electrode comprises a first electrostatic comb drive including comb fingers extending laterally parallel to the first axis;

and

wherein the first ground electrode comprises laterally extending beams offset with the comb fingers in the first hot electrode.

4. The MEMs device according to claim 1, further comprising:

a rolling element, surrounding the tilting element and receiving the ends of the first hinges, pivotable about a second axis perpendicular to the first axis;

second hinges, defining the second axis, extending from the rolling element, the outer ends of which are fixed to one of the first and second supports;

a second ground electrode connected to the rolling element; and

a second hot electrode mounted on the substrate, for attracting the first ground electrode, thereby rotating the rolling element, the tilting element and the reflective body about the second axis.

5. The MEMs device according to claim 4, wherein the first ground electrode, the second ground electrode, and the counter mass comprise a first layer;

wherein the tilting element, the rolling element, the first hinges, and the second hinges comprise a second layer; and

wherein the reflective body and the pedestal comprise a third layer, parallel to the first and second layers.

6. The MEMs device according to claim 5, wherein the rolling element comprises:

a first gimbal frame in the first layer fixed to a second gimbal frame in the second layer; and

wherein the second ground electrode extends from the first gimbal frame.

7. The MEMs device according to claim 6, wherein the second ground electrode comprises an arm extending from the first gimbal frame, and electrostatic roll comb fingers extending laterally cantilevered from the arm parallel to the first axis;

and wherein the second hot electrode includes fingers offset with the stator comb fingers.

8. The MEMs device according to claim 4, wherein the first hinges comprise serpentine torsional hinges with an aspect ratio greater than ten, enabling rotation of the tilting element about the first axis and resisting rotation of the tilting element about the second axis;

and

wherein the second hinges comprise serpentine torsional hinges with an aspect ratio greater than ten, enabling rotation of the rolling element about the second axis and resisting rotation of the rolling element about the first axis.

9. The MEMs device according to claim 1, wherein the reflective body is wider than the rolling element, whereby the reflective body can be positioned proximate a reflective body of an adjacent MEMs device with only an air gap therebetween.

10. A method of manufacturing a MEMs device comprising:

a) forming a substrate (207) with a first hot electrode thereon and mounting posts extending therefrom;

b) forming a ground electrode layer (203) on a first handle wafer (253) including;

a first ground electrode; and

a counter mass;

c) forming a reflective body section (204) including a pedestal and a reflective body on a second handle wafer (251);

d) forming a hinge layer (202) on a third handle wafer (254)

first hinges, defining the first axis extending laterally from opposite sides of the tilting element;

e) mounting the hinge layer (202) on the ground electrode layer (203);

f) removing the third handle wafer (254);

g) etching the hinge layer (202) to form a tilting element pivotable about a first axis; and

first hinges, defining the first axis extending laterally from opposite sides of the tilting element;

h) mounting the pedestal of the reflective body section (204) onto the tilting element of the hinge layer (202);

i) removing the first wafer handle (253) from the ground electrode layer (203);

j) mounting the ground electrode layer (203) to the mounting posts suspending the first ground electrode above the first hot electrode; and

g) removing the second handle wafer (251) of the reflective body section (204).

11. The method according to claim 10, wherein step a) also includes forming the substrate with a second hot electrode on the substrate;

wherein step c) also includes forming a first gimbal frame surrounding the first ground electrode with a second ground electrode extending from the first gimbal in the ground electrode layer; and

wherein step g) also includes forming;

a second gimbal frame, pivotable about a second axis perpendicular to the first axis, surrounding the tilting element, and receiving the ends of the first torsional hinge; and

second hinges, defining the second axis, extending longitudinally from opposite ends of rolling element.

12. The method according to claim 11, wherein the first hot electrode is mounted on the substrate along the second axis for rotating the tilting element and the reflective body about the first axis;

and

wherein the second hot electrode is mounted on the substrate and includes a first section along the second axis with one of the mounting posts between the first section and the first hot electrode, and a second section along the second axis with another of the mounting posts between the second section and the second hot electrode, for rotating the rolling element, the tilting element and the reflective body about the second axis.

13. The method according to claim 10, wherein step a) includes forming the first hot electrode with comb fingers extending laterally parallel to the first axis;

and wherein step b) includes forming the first ground electrode with laterally extending beams offset with the comb fingers in the first hot electrode.

14. The method according to claim 11, wherein the second ground electrode comprises an arm extending from the first gimbal frame, and electrostatic roller comb fingers extending laterally cantilevered from the arm parallel to the first axis;

and wherein the second hot electrode includes fingers offset with the stator comb fingers.

15. The method according to claim 11, wherein the first hinges comprise serpentine torsional hinges with an aspect ratio greater than ten, enabling rotation of the tilting element about the first axis and resisting rotation of the tilting element about the second axis;

and

wherein the second hinges comprise serpentine torsional hinges with an aspect ratio greater than ten, enabling rotation of the rolling element about the second axis and resisting rotation of the rolling element about the first axis.

16. The method according to claim 10, wherein step g) includes etching away the ends of the hinge layer to provide a larger air gap between the reflective body and the ground electrode layer.

17. A micro-electro-mechanical (MEMS) device comprising:

a substrate with first and second supports extending upwardly therefrom;

a tilting element pivotable about a first axis above the substrate in a first layer having a first thickness;

first hinges, defining the first axis, extending from opposite sides of the tilting element in the first layer connected to the first and second supports;

a rolling element, in the first layer surrounding the tilting element and receiving the ends of the first hinges, pivotable about a second axis perpendicular to the first axis;

second hinges, in the first layer defining the second axis, extending from the rolling element, the outer ends of which are fixed to one of the first and second supports;

a pedestal extending upwardly from the tilting element;

a reflective body mounted on the pedestal;

a first ground electrode in a second layer connected to an underside of the tilting element;

a first hot electrode mounted on the substrate for attracting the first ground electrode, thereby rotating the tilting element and the reflective body about the first axis;

a second ground electrode in the second layer connected to an underside of the rolling element; and

a second hot electrode mounted on the substrate, for attracting the first ground electrode, thereby rotating the rolling element, the tilting element and the reflective body about the second axis;

wherein the first and second ground electrodes in the second layer counter balance the weight of the reflective body about the first axis.