LOW PRESSURE VAPOR PHASE DEPOSITION OF ORGANIC THIN FILMS
First Claim
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1. An apparatus for the physical vapor deposition of an organic small molecule material on a substrate, said apparatus comprising:
- (a) a deposition chamber;
(b) at least one flow path in fluid communication with said deposition chamber, said flow path comprising;
(i) a carrier gas source,(ii) an organic small molecule material source containing a non-polymeric organic small molecule material that forms a non-polymeric organic thin film of the organic small molecule material, and(iii) a flow controller;
(c) a substrate holder disposed within said deposition chamber; and
(d) a vacuum pump in fluid communication with said deposition chamber and adapted to provide a pressure ranging from 0.001 torr to 100 torr within said deposition chamber;
wherein the deposition chamber has walls that may be heated to a temperature sufficiently high to avoid re-condensation of volatilized organic small molecule material, without decomposing the volatilized organic small molecule material, andwherein the non-polymeric organic thin film remains non-polymeric after deposition.
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Abstract
Methods for preparing organic thin films on substrates, the method comprising the steps of providing a plurality of organic precursors in the vapor phase, and reacting the plurality or organic precursors at a sub-atmospheric pressure. Also included are thin films made by such a method and apparatuses used to conduct such a method. The method is well-suited to the formation of organic light emitting devices and other display-related technologies.
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Citations
19 Claims
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1. An apparatus for the physical vapor deposition of an organic small molecule material on a substrate, said apparatus comprising:
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(a) a deposition chamber; (b) at least one flow path in fluid communication with said deposition chamber, said flow path comprising; (i) a carrier gas source, (ii) an organic small molecule material source containing a non-polymeric organic small molecule material that forms a non-polymeric organic thin film of the organic small molecule material, and (iii) a flow controller; (c) a substrate holder disposed within said deposition chamber; and (d) a vacuum pump in fluid communication with said deposition chamber and adapted to provide a pressure ranging from 0.001 torr to 100 torr within said deposition chamber; wherein the deposition chamber has walls that may be heated to a temperature sufficiently high to avoid re-condensation of volatilized organic small molecule material, without decomposing the volatilized organic small molecule material, and wherein the non-polymeric organic thin film remains non-polymeric after deposition. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. An apparatus for physical vapor deposition of a film comprising an organic small molecule material on a substrate, said apparatus comprising:
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a deposition chamber; means for heating said deposition chamber; means for introducing vapors of non-polymeric organic small molecule materials including a source containing the organic small molecule materials, wherein the organic small molecule materials form a non-polymeric organic thin film that remains non-polymeric after deposition, into said deposition chamber; means for cooling a substrate within said deposition chamber; and means for maintaining the pressure in said reaction chamber at a pressure ranging from 0.001 torr to 100 torr; means for heating the deposition chamber walls to a temperature sufficiently high to avoid re-condensation of vapors of the organic small molecule materials, without decomposing the organic small molecule materials. - View Dependent Claims (18)
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19. A method for preparing an organic thin film on a substrate, said method comprising the steps of:
- providing a plurality of organic precursors, said organic precursors being in the vapor phase; and
reacting said plurality of organic precursors at a sub-atmospheric pressure in the presence of said substrate to form said thin film on said substrate.
- providing a plurality of organic precursors, said organic precursors being in the vapor phase; and
Specification