CAPACITIVE PRESSURE SENSOR
First Claim
1. A capacitive pressure sensor, comprisinga first capacitor electrode and a second capacitor electrode spaced from the first capacitor electrode, said first and second capacitor electrodes being configured to be resiliently brought closer together under the action of a compressive force acting on the pressure sensor,as well as an evaluation circuit operatively connected to said first and second capacitor electrodes and configured to determine a quantity indicative of capacitance between said first and second capacitor electrodes,wherein said capacitive pressure sensor comprises a laminated arrangement with a first flexible, electrically insulating carrier film carrying said first capacitor electrode, a second flexible, electrically insulating carrier film carrying said second capacitor electrode and a flexible, electrically insulating spacer film sandwiched between said first and second carrier films, said spacer film having a through-hole or recess therein, with respect to which said first and second capacitor electrodes are arranged opposite one another in such a way that said first and second electrodes can be brought closer together by resilient bending of said first and/or second carrier film into said through-hole or recess under the action of a compressive force acting on the pressure sensor.
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Accused Products
Abstract
A capacitive pressure includes a laminated arrangement with a first flexible, electrically insulating carrier film carrying a first capacitor electrode, a second flexible, electrically insulating carrier film carrying a second capacitor electrode and a flexible, electrically insulating spacer film sandwiched between the first and second carrier films, where the spacer film has a through-hole or recess therein, with respect to which the first and second capacitor electrodes are arranged opposite one another, in such a way that the first and second electrodes are brought closer together by resilient bending of the first and/or second carrier film into the through-hole or recess under the action of a compressive force acting on the pressure sensor.
104 Citations
20 Claims
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1. A capacitive pressure sensor, comprising
a first capacitor electrode and a second capacitor electrode spaced from the first capacitor electrode, said first and second capacitor electrodes being configured to be resiliently brought closer together under the action of a compressive force acting on the pressure sensor, as well as an evaluation circuit operatively connected to said first and second capacitor electrodes and configured to determine a quantity indicative of capacitance between said first and second capacitor electrodes, wherein said capacitive pressure sensor comprises a laminated arrangement with a first flexible, electrically insulating carrier film carrying said first capacitor electrode, a second flexible, electrically insulating carrier film carrying said second capacitor electrode and a flexible, electrically insulating spacer film sandwiched between said first and second carrier films, said spacer film having a through-hole or recess therein, with respect to which said first and second capacitor electrodes are arranged opposite one another in such a way that said first and second electrodes can be brought closer together by resilient bending of said first and/or second carrier film into said through-hole or recess under the action of a compressive force acting on the pressure sensor.
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11. A method for producing a capacitive pressure sensor, said capacitive pressure sensor to be produced, comprising
a first capacitor electrode and a second capacitor electrode spaced from the first capacitor electrode, said first and second capacitor electrodes being configured to be resiliently brought closer together under the action of a compressive force acting on the pressure sensor, as well as an evaluation circuit operatively connected to said first and second capacitor electrodes and configured to determine a quantity indicative of capacitance between said first and second capacitor electrodes, wherein said capacitive pressure sensor comprises a laminated arrangement with a first flexible, electrically insulating carrier film carrying said first capacitor electrode, a second flexible, electrically insulating carrier film carrying said second capacitor electrode and a flexible, electrically insulating spacer film sandwiched between said first and second carrier films, said spacer film having a through-hole or recess therein, with respect to which said first and second capacitor electrodes are arraged opposite one another in such a way that said first and second electrodes can be brought closer together by resilient bending of said first and/or second carrier film into said through-hole or recess under the action of a compressive force acting on the pressure sensor wherein said method comprises: -
applying said first capacitor electrode onto said first flexible carrier film and said second capacitor electrode onto said second flexible carrier film; providing a flexible spacer film with an opening or recess; and laminating together said first first flexible carrier film carrying said first capacitor electrode, said spacer film and said second flexible carrier film carrying said second capacitor electrode in such a way that said first and second capacitor electrodes are arranged opposite one another with respect to said opening or recess; and operatively connecting to said first and second capacitor electrodes an evaluation circuit configured to determine a quantity indicative of capacitance between said first and second capacitor electrodes.
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12. A capacitive pressure sensor, comprising
a first capacitor electrode and a second capacitor electrode spaced from the first capacitor electrode, said first and second capacitor electrodes being configured to be resiliently brought closer together under the action of a compressive force acting on the pressure sensor, as well as an evaluation circuit operatively connected to said first and second capacitor electrodes and configured to determine a quantity indicative of capacitance between said first and second capacitor electrodes, wherein said capacitive pressure sensor comprises a laminated arrangement with a first flexible, electrically insulating carrier film carrying said first capacitor electrode, a second flexible, electrically insulating carrier film carrying said second capacitor electrode and a flexible, electrically insulating spacer film sandwiched between said first and second carrier films, said spacer film having a through-hole or recess therein, with respect to which said first and second capacitor electrodes are arranged opposite one another in such a way that said first and second electrodes can be brought closer together by resilient bending of said first and/or second carrier film into said through-hole or recess under the action of a compressive force acting on the pressure sensor, wherein at least one of said first and said second carrier films comprises one or more layers made of thermoplastic polymer material and wherein said flexible spacer film is configured as a double-sided adhesive.
Specification