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SEPARATION APPARATUS AND SEPARATION METHOD

  • US 20100107834A1
  • Filed: 04/09/2009
  • Published: 05/06/2010
  • Est. Priority Date: 11/04/2008
  • Status: Active Grant
First Claim
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1. A separation apparatus for separating two planar devices that are bonded by an adhesive layer, the separation apparatus comprising:

  • a base;

    a sliding module mounted on the base;

    a cutting member connected to the sliding module and moveable in a two-dimensional plane with respect to the base by the sliding module for cutting the adhesive layer; and

    a positioning stage mounted on the base and positioning the planar devices and the adhesive layer therebetween on the base.

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