METHOD FOR CONTROLLING OR REGULATING A VACUUM VALVE
First Claim
1. Method for controlling or regulating a vacuum valve that comprises:
- a valve body (1) with a valve opening (2),a closing member (3) that can be moved between an open position and a closed position over a closing path (s) for closing the vacuum valve and that closes the valve opening (2) in the closed position, wherein, in the closed position, at least one elastic seal (4) is pressed onto a seal face (35) and, during movement of the closing member (3) from the open position into the closed position, the elastic seal (4) contacts the seal face (35) at a contact point (p) of the closing path (s),an actuator (5) for moving the closing member (3), anda control device (9) by which the actuator (5) is triggered,Wherein at least one of the contact point (p) of the closing path (s) at which the elastic seal (4) contacts the seal face (35) or the velocity (v) of the closing member (3) at the contact point (p) is used as a controlling parameter for the control device (9).
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Accused Products
Abstract
A method for controlling or regulating a vacuum valve that includes: a valve body (1) with a valve opening (2); a closing member (3) that can be moved between an open position and a closed position over a closing path (s) for closing the vacuum valve and that closes the valve opening (2) in the closed position, in which at least one elastic seal (4) is pressed onto a seal face (35); an actuator (5) for moving the closing member (3); and a control device (9) by which the actuator (5) can be triggered; the point (p) of the closing path (s) at which the elastic seal (4) contacts the seal face (35) and/or a velocity (v) of the closing member (3) at that point is used as a controlling parameter for the control device (9).
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Citations
14 Claims
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1. Method for controlling or regulating a vacuum valve that comprises:
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a valve body (1) with a valve opening (2), a closing member (3) that can be moved between an open position and a closed position over a closing path (s) for closing the vacuum valve and that closes the valve opening (2) in the closed position, wherein, in the closed position, at least one elastic seal (4) is pressed onto a seal face (35) and, during movement of the closing member (3) from the open position into the closed position, the elastic seal (4) contacts the seal face (35) at a contact point (p) of the closing path (s), an actuator (5) for moving the closing member (3), and a control device (9) by which the actuator (5) is triggered, Wherein at least one of the contact point (p) of the closing path (s) at which the elastic seal (4) contacts the seal face (35) or the velocity (v) of the closing member (3) at the contact point (p) is used as a controlling parameter for the control device (9). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification