MEMS G-switch device
First Claim
1. A MEMS G-switch comprising:
- a silicon substrate;
a proof mass;
one or more moveable driving stages attached to said proof mass;
a plurality of mechanical springs each having one end attached to said substrate and another end attached to said one or more moveable driving stages;
one or more fixed driving stages attached to said substrate;
bumps attached on said moveable driving stages or said fixed driving stages; and
a voltage control circuit applying voltage between said moveable driving stages and said fixed driving stages wherein two different working voltages are generated by said voltage control circuit when said G-switch turns on and off.
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Accused Products
Abstract
A Micro Electro Mechanical Systems (MEMS) G-switch includes one or more actuators formed between fixed driving stages and moveable driving stages. A proof mass is attached to the moveable driving stages and flexibly attached to a substrate through one or more spring members. A voltage control circuit applies working voltages to the driving stages. With a first working voltage applied between the moveable and the fixed driving stages, moving of the driving stages'"'"' sensing direction towards gravity at a first critical angle will cause moveable driving stages to collapse and touch the fixed driving stage on the substrate and thus turn on the MEMS G-switch. After turning on the G-switch, a second working voltage is applied and moving of the driving stages'"'"' sensing direction away from gravity at a second critical angle will cause moveable electrodes to deviate from the fixed electrodes and thus turn off the MEMS G-switch.
24 Citations
22 Claims
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1. A MEMS G-switch comprising:
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a silicon substrate; a proof mass; one or more moveable driving stages attached to said proof mass; a plurality of mechanical springs each having one end attached to said substrate and another end attached to said one or more moveable driving stages; one or more fixed driving stages attached to said substrate; bumps attached on said moveable driving stages or said fixed driving stages; and a voltage control circuit applying voltage between said moveable driving stages and said fixed driving stages wherein two different working voltages are generated by said voltage control circuit when said G-switch turns on and off. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A MEMS G-switch comprising:
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a substrate; a proof-mass; a fixed driving stage attached to said substrate; a plurality of mechanical springs; a moveable driving stage attached to said proof mass and suspended above said substrate by said plurality of mechanical springs; a voltage control circuit applying working voltage to said moveable and fixed driving stages; and a bump attached between said fixed and said moveable driving stages; wherein, when said MEMS G-switch is turned off, a first working voltage is applied to said moveable driving stage, thereby moving said moveable driving stage'"'"'s sensing direction towards gravity at a first critical angle, and thereby turning on said MEMS G-switch; and wherein, when said MEMS G-switch is turned on, a second working voltage is applied to said moveable driving stage, thereby moving said moveable driving stage'"'"'s sensing direction away from gravity at a second critical angle, and thereby turning off said MEMS G-switch. - View Dependent Claims (13, 14, 15)
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16. A MEMS G-switch comprising:
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a substrate; a proof-mass; one or more moveable driving stages attached to said proof mass; a plurality of mechanical springs each having one end attached to said substrate and another end attached to said moveable driving stages; one or more fixed driving stages attached to said substrate; bumps attached on said fixed driving stages or said moveable driving stages; and a voltage control circuit applying voltage between said moveable driving stages and said fixed driving stages; wherein, when said one or more moveable driving stages are separated from said one or more fixed driving stages and a first working voltage is applied to them by said voltage control circuit, said MEMS G-switch is turned off; and wherein, when said one or more moveable driving stages touch said fixed driving stages through said bumps and a second working voltage is applied to them by said voltage control circuit, said MEMS G-switch is turned on.
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17. A method for manufacturing a MEMS G-switch comprising:
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providing a substrate; forming a proof-mass in or above said substrate; providing one or more fixed driving stages attached to said substrate; attaching one or more moveable driving stages to said proof mass; providing a plurality of mechanical springs to suspend said one or more moveable driving stages above said substrate; providing one or more bumps attached between said fixed and said moveable driving stages; and providing a voltage control circuit to control two working voltages applied to said one or more driving stages alternatively when said G-Switch turns on and off. - View Dependent Claims (18, 19, 20, 21, 22)
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Specification