Integrated Tool for Fabricating an Electronic Component
First Claim
1. A tool for use in fabricating an electronic component comprising:
- a plurality of processing modules;
a transfer chamber in communication with each of the plurality of processing modules and having a robotically moveable arm for transferring a structure to each of the plurality of processing modules;
wherein the plurality of processing modules and the transfer chamber are sealed from the surrounding environment and are under a vacuum, the plurality of processing modules including;
a first module configured to perform a first process, wherein the first process includes performing at least one shaping operation on the structure; and
a second module configured to perform a second process.
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Accused Products
Abstract
A tool for use in fabricating an electronic component includes a plurality of processing modules and a transfer chamber in communication with each of the plurality of processing modules. The transfer chamber includes a component for transferring a structure to each of the plurality of processing modules. The plurality of processing modules and the transfer chamber are sealed from the surrounding environment and are under a vacuum. The plurality of processing modules includes a first module configured to perform a first process on the structure and a second module configured to perform a second process on the structure. The first process includes performing at least one shaping operation on the structure.
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Citations
20 Claims
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1. A tool for use in fabricating an electronic component comprising:
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a plurality of processing modules; a transfer chamber in communication with each of the plurality of processing modules and having a robotically moveable arm for transferring a structure to each of the plurality of processing modules; wherein the plurality of processing modules and the transfer chamber are sealed from the surrounding environment and are under a vacuum, the plurality of processing modules including; a first module configured to perform a first process, wherein the first process includes performing at least one shaping operation on the structure; and a second module configured to perform a second process. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of fabricating an electronic component comprising:
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forming a structure by depositing layered magnetic material on a substrate, the layered magnetic material including a trailing edge, a leading edge and a pair of opposing sidewalls extending between the trailing edge and the leading edge; placing the structure in a tool, the tool including a plurality of processing modules and a transfer chamber in communication with each of the plurality of processing modules and having a component for transferring the structure to each of the plurality of processing modules, wherein the plurality of processing modules and the transfer chamber are sealed from the surrounding environment and are under a vacuum; transferring the structure from the transfer chamber into a first module of the plurality of processing modules, the first module configured to perform a first process on the structure, the first process including defining the structure by performing at least one shaping operation on the structure; and transferring the structure from the first module to a second module of the plurality of processing modules, the second module configured to perform a second process on the structure. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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18. A tool for use in fabricating an electronic component comprising:
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a plurality of processing modules; a transfer chamber in communication with each of the plurality of processing modules and having a robotically moveable arm for transferring a structure to each of the plurality of processing modules, the structure including layered magnetic material formed on a substrate, the layered magnetic material including a trailing edge, a leading edge and a pair of opposing sidewalls extending between the trailing edge and the leading edge; wherein the plurality of processing modules and the transfer chamber are sealed from the surrounding environment and are under a vacuum, the plurality of processing modules including; a first module configured to perform a first process on the structure, wherein the first process includes performing at least one shaping operation on the pair of opposing sidewalls of the layered magnetic device; and a second module configured to perform a second process on the structure, wherein the second process includes depositing a protective material on at least the pair of opposing sidewalls of the layered magnetic device. - View Dependent Claims (19, 20)
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Specification