FLASH MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
First Claim
1. An apparatus comprising:
- a semiconductor substrate having a trench formed therein, the trench including a device isolation film;
an oxide film formed over the semiconductor substrate including the trench;
a nitride film pattern inserted into the oxide film and formed at a sidewall of the trench; and
a polysilicon pattern formed over the oxide film including the nitride film pattern.
1 Assignment
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Accused Products
Abstract
A flash memory device includes a semiconductor substrate having a trench formed therein, the trench including a device isolation film, an oxide film formed over the semiconductor substrate including the trench, a nitride film pattern inserted into the oxide film and formed at a sidewall of the trench, and a polysilicon pattern formed over the oxide film including the nitride film pattern. A method for manufacturing a flash memory device includes forming a first oxide film over the semiconductor substrate including the trench, forming the nitride film pattern at the sidewall of the trench provided with the first oxide film and forming a second oxide film over the semiconductor substrate including the nitride film pattern, forming an oxide film pattern at a contact surface between the nitride film pattern and the semiconductor substrate and a side of the nitride film pattern by partially removing the first oxide film and the second oxide film formed over the bottom of the trench and the semiconductor substrate, and forming a third oxide film over the semiconductor substrate including the oxide film pattern to form the oxide cover film into which the nitride film pattern is inserted.
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Citations
20 Claims
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1. An apparatus comprising:
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a semiconductor substrate having a trench formed therein, the trench including a device isolation film; an oxide film formed over the semiconductor substrate including the trench; a nitride film pattern inserted into the oxide film and formed at a sidewall of the trench; and a polysilicon pattern formed over the oxide film including the nitride film pattern. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 20)
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9. A method comprising:
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forming a trench in a semiconductor substrate provided with a device isolation film; forming an oxide cover film over the semiconductor substrate including the trench, the oxide cover film including a nitride film pattern; and forming a polysilicon pattern over the oxide cover film including the nitride film pattern, wherein the nitride film pattern is inserted into the oxide cover film and formed at a sidewall of the trench. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification