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Method and Apparatus for Making and Processing Aberration Measurements

  • US 20100111421A1
  • Filed: 11/06/2008
  • Published: 05/06/2010
  • Est. Priority Date: 11/06/2008
  • Status: Active Grant
First Claim
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1. A method for determining a centroid coordinate of an image spot, comprising:

  • a) determining a search region having a border;

    b) identifying a first pixel in the search region, the pixel having a first intensity value;

    c) determining an upper threshold intensity value greater than the first intensity value;

    d) searching for a second pixel within the search region having an intensity value that is greater than the upper threshold intensity value; and

    e) upon finding the second pixel, designating the first pixel an integration region center.

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