INTEGRATED BIO-CHIP, METHOD OF FABRICATING THE INTEGRATED BIO-CHIP, AND APPARATUS FOR DETECTING BIO-MATERIAL

• US 20100111762A1
• Filed: 10/30/2009
• Published: 05/06/2010
• Est. Priority Date: 10/31/2008
• Status: Active Grant

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: CHO, Seong-ho
• Granted Patent: US 8,263,001 B2
• Time in Patent Office: Days
• US Class Current: 422/52
• CPC Class Codes: B01J 2219/00524 in the shape of fiber bundles
• CPC Class Codes: B01J 2219/00576 fluorophore
• CPC Class Codes: B01J 2219/00659 Two-dimensional arrays
• CPC Class Codes: B01J 2219/00702 Processes involving means for analysing and characterising the products
• CPC Class Codes: G01N 2021/6484 Optical fibres
• CPC Class Codes: G01N 21/6428 Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" in vivo A61B5/00; immunoassay G01N33/53
• CPC Class Codes: G01N 21/6452 Individual samples arranged in a regular 2D-array, e.g. multiwell plates
• CPC Class Codes: G01N 21/6454 using an integrated detector array

Abstract

An integrated bio-chip includes a substrate and one or more excitation light absorbing waveguides disposed in the substrate. The substrate includes one or more reaction regions on which samples are disposed. An end portion of each of the one or more excitation light absorbing waveguides is exposed from the substrate at an upper surface thereof, another end portion of each of the one or more excitation light absorbing waveguides is exposed from the substrate at a lower surface thereof, and the one or more reaction regions are disposed at a upper surface of the substrate. The one or more excitation light absorbing waveguides absorbs excitation light incident to the samples, and transmits fluorescent light emitted from the samples.

Claims

1. An integrated bio-chip comprising:

a substrate including one or more reaction regions on which samples are disposed; and

one or more excitation light absorbing waveguides disposed in the substrate, wherein

a first end portion of each of the one or more excitation light absorbing waveguides is exposed from the substrate at an upper surface thereof,

a second end portion of each of the one or more excitation light absorbing waveguides is exposed from the substrate at a lower surface thereof,

the one or more reaction regions are disposed at the upper surface of the substrate,

the one or more excitation light absorbing waveguides absorbs excitation light which excites the samples, and

the one or more excitation light absorbing waveguides transmits fluorescent light emitted from the samples.

2. The integrated bio-chip of claim 1, wherein

each of the one or more excitation light absorbing waveguides includes a color filter core which transmits the fluorescent light emitted from the samples and absorbs the excitation light which excites the samples.

3. The integrated bio-chip of claim 2, wherein a refractive index of the color filter core is greater than a refractive index of the substrate surrounding the color filter core.

4. The integrated bio-chip of claim 2, wherein

each of the one or more excitation light absorbing waveguides further includes a clad layer disposed around the color filter core, and

a refractive index of the clad layer is less than a refractive index of the color filter core.

5. The integrated bio-chip of claim 2, wherein a shape of a transverse cross-section of the color filter core is one of a circle and a polygon.

6. The integrated bio-chip of claim 1, wherein surfaces of the one or more reaction regions are treated to attach the samples thereto.

7. The integrated bio-chip of claim 6, wherein

the surfaces of the one or more reaction regions have hydrophilic properties, and

non-reaction regions surrounding the surfaces of the one or more reaction regions have hydrophobic properties.

8. The integrated bio-chip of claim 1, further comprising one or more micro lenses disposed on the one or more reaction regions, wherein the one or more micro lenses condense the fluorescent light emitted from the samples.

9. The integrated bio-chip of claim 8, wherein the one or more micro lenses is a concave lens.

10. The integrated bio-chip of claim 8, wherein the one or more micro lenses is a convex lens.

11. The integrated bio-chip of claim 1, further comprising one or more anti-reflection layers disposed on the one or more reaction regions, wherein the one or more anti-reflection layers transmit the fluorescent light emitted from the samples.

12. The integrated bio-chip of claim 1, further comprising a photodetector disposed at the lower surface of the substrate, wherein the lower surface of the substrate is opposite to the upper surface of the substrate on which the one or more reaction regions is disposed.

13. The integrated bio-chip of claim 12, wherein the photodetector is disposed one of spaced apart from and adjacent to the substrate and in contact with the substrate.

14. The integrated bio-chip of claim 12, wherein pixels of the photodetector correspond to the one or more reaction regions in one of a one-to-one correspondence and a one-to-many correspondence.

15. The integrated bio-chip of claim 12, wherein the photodetector includes one of a photomultiplier tube, a charge coupled device and a complementary metal oxide semiconductor image sensor.

16. A method of fabricating an integrated bio-chip, the method comprising:

forming one or more penetration holes in a substrate;

forming one or more excitation light absorbing waveguides in the one or more penetration holes; and

treating a surface of the substrate in which the one or more penetration holes are formed such that samples are attachable to reaction regions at which the one or more excitation light absorbing waveguides are formed.

17. The method of claim 16, wherein

the one or more penetration holes are through vias formed in the substrate, and

the substrate comprises one of a semiconductor material, a dielectric material, a metal material and a polymer material.

18. The method of claim 16, wherein the forming the one or more excitation light absorbing waveguides comprises forming a color filter core by disposing a color filter material in each of the one or more penetration holes.

19. The method of claim 18, wherein the forming the one or more excitation light absorbing waveguides further comprises forming a clad layer on an inner wall of each of the one or more penetration holes.

20. The method of claim 19, wherein the forming the clad layer includes oxidizing the inner wall of each of the one or more penetration holes to reduce a refractive index of the inner wall of each of the one or more penetration holes.

21. The method of claim 19, wherein the forming the clad layer includes diffusing a dopant onto the inner wall of each of the one or more penetration holes to reduce a refractive index of the inner wall of each of the one or more penetration holes.

22. The method of claim 19, wherein the forming the clad layer includes applying a material having a refractive index which is less than a refractive index of a color filter core to the inner wall of each of the one or more penetration holes.

23. The method of claim 16, wherein the treating the surface of the substrate includes treating portions of the substrate at which the one or more excitation light absorbing waveguides are formed such that the portions have a hydrophilic property.

24. The method of claim 16, further comprising forming an anti-reflection layer on portions of the substrate adjacent to the reaction regions.

25. The method of claim 16, further comprising forming one or more micro lenses on portions of the substrate at which the one or more excitation light absorbing waveguides are formed.

26. The method of claim 16, further comprising performing a back-lap process to polish a lower surface of the substrate to a depth which is greater than a length of the one or more penetration holes.

27. An apparatus for detecting bio-material using an integrated bio-chip comprising a substrate including one or more reaction regions on which samples are disposed and one or more excitation light absorbing waveguides disposed in the substrate, the apparatus comprising:

an illuminating optical system which irradiates excitation light onto the integrated bio-chip;

a stage detachably mounted to the integrated bio-chip; and

a photodetector which detects fluorescent light emitted from the integrated bio-chip, wherein

a first end portion of each of the one or more excitation light absorbing waveguides is exposed from the substrate at an upper surface thereof,

a second end portion of each of the one or more excitation light absorbing waveguides is exposed from the substrate at a lower surface thereof,

the one or more reaction regions are disposed at the upper surface of the substrate,

the one or more excitation light absorbing waveguides absorbs excitation light which excites the samples, and

the one or more excitation light absorbing waveguides transmits the fluorescent light emitted from the samples.

28. The apparatus of claim 27, wherein the photodetector is disposed on the stage.

29. The apparatus of claim 28, wherein the photodetector is disposed one of spaced apart from and adjacent to the integrated bio-chip and in contact with the integrated bio-chip.

30. The apparatus of claim 27, further comprising a detecting optical system which transfers the fluorescent light emitted from the integrated bio-chip to the photodetector.

31. The apparatus of claim 27, wherein pixels of the photodetector correspond to the one or more reaction regions in one of a one-to-one correspondence and a one-to-many correspondence.

32. The apparatus of claim 27, wherein the photodetector includes one of a photomultiplier tube, a charge coupled device and a complementary metal oxide semiconductor image sensor.