METHOD FOR THE CREATION OF PLANAR VARIATIONS IN SIZE OR DISTANCE IN NANOSTRUCTURE PATTERNS ON SURFACES

• US 20100112234A1
• Filed: 03/12/2008
• Published: 05/06/2010
• Est. Priority Date: 04/11/2007
• Status: Active Grant

• Current Assignee: Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften e.V. (Max-Planck-Gesellschaft zur Frderung der Wissenschaften e)
• Original Assignee: Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften e.V. (Max-Planck-Gesellschaft zur Frderung der Wissenschaften e)
• Inventors: Arnold, Marco, Spatz, Joachim P., Lohmueller, Theobald
• Granted Patent: US 8,257,798 B2
• Time in Patent Office: Days
• US Class Current: 427/535
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 5/00 Nanobiotechnology or nanomedicine, e.g. protein engineering or drug delivery
• CPC Class Codes: C23C 18/08 characterised by the deposition of metallic material
• CPC Class Codes: C23C 18/1216 Metal oxides C23C18/1212 takes precedence
• CPC Class Codes: C23C 18/1237 Composite substrates, e.g. laminated, premixed
• CPC Class Codes: C23C 18/1266 Particles formed in situ
• CPC Class Codes: C23C 18/1295 with after-treatment of the deposited inorganic material
• CPC Class Codes: C23C 18/143 Radiation by light, e.g. photolysis or pyrolysis

Abstract

A method for creating extensive variations in size or distance in nanostructure patterns on surfaces preferably includes: a) contacting a substrate with a liquid phase containing organic two-block or multi-block copolymer micelles, which are charged with an inorganic metal compound, by immersion into this liquid phase, during which chemically different polymer domains including inorganic metal compounds enclosed in micelles are deposited on the substrate; b) withdrawing the substrate from the liquid phase at a predetermined withdrawing speed, which is varied continuously or gradually, so that a gradient of the lateral separation length of the polymer domains is produced on the substrate surface; c) converting the deposited inorganic metal compounds by an oxidation- or reduction treatment into inorganic nanoparticles and optionally complete or partial removal of the organic polymer by a plasma treatment, wherein positions and lateral separation length of the nanoparticles obtained are determined by those of deposited polymer domains.

Claims

1. A method for variation of sizes or distances in patterns of nanostructures on a substrate, comprising

a) contacting a substrate with a liquid phase that contains micelles of an organic two-block- or multi-block copolymer, said micelles being charged with an inorganic metal compound, by immersion into the liquid phase, during which chemically different polymer domains comprising metal compounds enclosed in micelles are deposited on the substrate;

b) withdrawing of the substrate from the liquid phase at a predetermined withdrawing speed, which withdrawing speed is varied continuously or gradually, so that a Igradient of a lateral separation length of the polymer domains is produced on a substrate surface;

c) conversion of the metal compounds in the deposited polymer domains by an oxidation- or reduction treatment into inorganic nanoparticles and optionally complete or partial removal of the organic copolymer by a plasma treatment, wherein positions and a lateral separation length of the nanoparticles obtained are determined by positions and a lateral separation length of the deposited polymer domains.

2. The method according to claim 1, wherein the withdrawing speed in step b) is varied in a range of 0.1 mm/min to 100 mm/min.

3. The method according to claim 2, wherein several different separation length gradients are produced in series on the same substrate surface.

4. The method according to one of claim 1, wherein the reductive conversion of the metal compounds in the polymer domains deposited on the substrate surface into nanoparticles takes place in step c) by irradiation with a light field intensity-modulated laterally along the substrate surface, as a result of which differently sized nanoparticles are produced as a function of the light intensity at different positions of the substrate surface.

5. The method according to claim 1, further comprising the following steps:

d) contacting of the substrate with the nanoparticles obtained according to step c) with a liquid phase containing a solution of an inorganic metal compound by immersion into the liquid phase, during which dissolved material grows on the nanoparticles and thus enlarges the nanoparticles; and

e) withdrawing the substrate from the liquid phase after a predetermined time period, as a result of which a desired size of the nanoparticles is adjusted.

6. The method according to claim 5, wherein a gradient of the particle size is produced on the substrate surface by variation of the withdrawing speed in step e).

7. The method according to claim 5, wherein the nanoparticles are irradiated on the substrate surface during the steps d) and e) with a light field intensity-modulated laterally along the substrate surface, as a result of which differently sized nanoparticles are produced at different positions of the substrate surface on account of a differing growth speed of the nanoparticles that is a function of the light intensity.

8. The method according to claim 7, wherein a gradient of the particle size is produced by the irradiation with an intensity-modulated light field.

9. The method according to claim 8, wherein at least one separation length gradient as well as at least one particle size gradient of the nanoparticles is produced on a nanostructured substrate surface.

10. The method according to claim 1, wherein the inorganic metal compound comprises at least one salt of the metals selected from the group consisting of Au, Pt, Pd, Ag, In, Fe, Zr, Al, Co, Ni, Ga, Sn, Zn, Ti, Si and Ge.

11. The method according to claim 1, wherein the two-block- or multi-block copolymer is a member selected from the group consisting of polystyrene (n)-b-poly (2-vinylpyridine (m), polystyrene (n)-b-poly (4-vinylpyridine (m), and polystyrene (n)-b-poly (ethylene oxide) (m), in which n and m indicate a number of repetition units and are, independently of one another, integers in a range of 10-10,000.

19. The method according to claim 4, wherein a gradient of the particle size is produced by the irradiation with an intensity-modulated light field.

20. The method according to claim 4, further comprising the following steps:

d) contacting of the substrate with the nanoparticles obtained according to step c) with a liquid phase containing a solution of an inorganic metal compound by immersion into the liquid phase, during which dissolved material grows on the nanoparticles and thus enlarges the nanoparticles; and

e) withdrawing the substrate from the liquid phase after a predetermined time period, as a result of which a desired size of the nanoparticles is adjusted.

21. The method according to claim 20, wherein the nanoparticles are irradiated on the substrate surface during the steps d) and e) with a light field intensity-modulated laterally along the substrate surface, as a result of which differently sized nanoparticles are produced at different positions of the substrate surface on account of a differing growth speed of the nanoparticles that is a function of the light intensity.

22. The method according to claim 4, wherein the intensity of the light field is adjusted gradually or in stages in an extensive area by interference and diffraction on static or dynamically variable optical elements.

23. The method according to claim 7, wherein the intensity of the light field is adjusted gradually or in stages in an extensive area by interference and diffraction on static or dynamically variable optical elements.

12. A method for producing nanoparticles with a laterally variable size on a substrate surface, wherein a polymer film containing at least one inorganic metal compound is deposited on a substrate surface and is then irradiated with a light field laterally intensity-modulated in an extensive area, as a result of which the metal compound is reduced and converted into nanoparticles and the size of the nanoparticles at a certain position of the substrate surface is a function of an intensity of the light field at the position.

13. The method according to claim 12, wherein a gradient of the particle size is produced on the substrate surface.

14. The method according to claim 12, wherein the polymer film is deposited on the substrate surface in such a manner that an ordered structure of polymer domains containing metal compound(s) is produced with a certain lateral separation length, said lateral separation length determining the separation length of the nanoparticles after the conversion of the metal compounds into nanoparticles.

15. The method according to claim 14, wherein a separation length gradient of polymer domains is produced on the substrate surface.

16. The method according to claim 12, wherein the substrate with the deposited polymer film is subjected after the irradiation with light to a plasma treatment that entirely or partially degrades the polymer.

17. The method according to claim 12, wherein the substrate surface with the formed nanoparticles is subsequent introduced into a liquid phase containing a solution of an inorganic metal compound, during which dissolved material grows on the nanoparticles and thus enlarges them, and the substrate is withdrawn from the liquid phase after a predetermined time period, as result of which a desired size of the nanoparticles is adjusted.

18. The method according to claim 12, wherein the intensity of the light field is adjusted gradually or in stages in an extensive area by interference and diffraction on static or dynamically variable optical elements.