Method for Producing Semiconductor Chips using Thin Film Technology
First Claim
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1. A method for producing thin film semiconductor chips, the method comprising the steps:
- applying an active layer sequence, which is suitable for generating electromagnetic radiation, on a growth substrate,forming a reflective electrically conductive contact material layer on the active layer sequence,patterning the active layer sequence and the contact material layer to form active layer stacks, which are separate from one another, on the growth substrate,applying a flexible electrically conductive foil to the reflective electrically conductive contact material layer, andat least partially removing the growth substrate.
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Abstract
For semiconductor chips using thin film technology, an active layer sequence is applied to a growth substrate, on which a reflective electrically conductive contact material layer is then formed. The active layer sequence is patterned to form active layer stacks, and reflective electrically conductive contact material layer is patterned to be located on each active layer stack. Then, a flexible, electrically conductive foil is applied to the contact material layers as an auxiliary carrier layer, and the growth substrate is removed.
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19 Claims
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1. A method for producing thin film semiconductor chips, the method comprising the steps:
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applying an active layer sequence, which is suitable for generating electromagnetic radiation, on a growth substrate, forming a reflective electrically conductive contact material layer on the active layer sequence, patterning the active layer sequence and the contact material layer to form active layer stacks, which are separate from one another, on the growth substrate, applying a flexible electrically conductive foil to the reflective electrically conductive contact material layer, and at least partially removing the growth substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method for producing thin film semiconductor chips, the method comprising the steps of:
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applying an active layer sequence, which is suitable for generating electromagnetic radiation, on a growth substrate; forming a reflective electrically conductive contact material layer on the active layer sequence; forming composite layer stacks separated from each other on the growth substrate, each of the composite layer stacks comprising a part of the active layer sequence and a part of the reflective electrically conductive contact material layer; applying a flexible electrically conductive foil to the reflective electrically conductive contact material layer; and at least partially removing the growth substrate. - View Dependent Claims (17, 18, 19)
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Specification