ANGULAR VELOCITY SENSOR
First Claim
1. An angular velocity sensor, comprising:
- a detection element, which has a sensing section arranged in a flexible body and sensing distortion of the flexible body; and
a detection circuit section, which detects an angular velocity relating to the detection element, whereinthe sensing section has a sensing electrode section made up of an upper electrode and a lower electrode with a piezoelectric body interposed therebetween, and the detection circuit section detects an angular velocity based upon angular velocity signals outputted from the sensing electrode section in accordance with the angular velocity,the angular velocity signals include an X component signal around an X axis and a Z component signal around a Z axis in a case of defining a space by the Z axis vertical to a surface of the detection element, and the X axis and a Y axis that are orthogonal to the Z axis and orthogonal to each other, andthe detection circuit section is provided with a separation circuit that separates the X component signal and the Z component signal.
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Accused Products
Abstract
There is provided a signal separation circuit of an angular velocity sensor where a first sensing section, a second sensing section and a third sensing section which are arranged in two second arms are connected to a detection circuit section, and in this detection circuit section, an angular velocity is detected based upon angular velocity signals outputted from the first to third sensing electrode sections.
A configuration is formed where angular velocity signals include an X component signal around an X axis, a Y component signal around a Y axis, a Z component signal around a Z axis and an oscillating component signal of a flexible body in the mutually orthogonal X axis, Y axis and Z axis, and the detection circuit section is provided with a separation circuit that separates these X component signal, Y component signal, Z component signal and oscillating component signal.
11 Citations
15 Claims
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1. An angular velocity sensor, comprising:
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a detection element, which has a sensing section arranged in a flexible body and sensing distortion of the flexible body; and a detection circuit section, which detects an angular velocity relating to the detection element, wherein the sensing section has a sensing electrode section made up of an upper electrode and a lower electrode with a piezoelectric body interposed therebetween, and the detection circuit section detects an angular velocity based upon angular velocity signals outputted from the sensing electrode section in accordance with the angular velocity, the angular velocity signals include an X component signal around an X axis and a Z component signal around a Z axis in a case of defining a space by the Z axis vertical to a surface of the detection element, and the X axis and a Y axis that are orthogonal to the Z axis and orthogonal to each other, and the detection circuit section is provided with a separation circuit that separates the X component signal and the Z component signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An angular velocity sensor, comprising:
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a detection element, which has a sensing section arranged in a flexible body and sensing distortion of the flexible body; and a detection circuit section, which detects an angular velocity relating to the detection element, wherein the sensing section has a plurality of sensing electrode sections each made up of an upper electrode and a lower electrode with a piezoelectric body interposed therebetween, and the detection circuit section selectively picks out a sum/difference signal value from angular velocity signals from the plurality of sensing electrode sections. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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Specification