METHOD FOR CONTROLLING OR REGULATING A VACUUM VALVE

• US 20100116349A1
• Filed: 01/15/2010
• Published: 05/13/2010
• Est. Priority Date: 07/24/2007
• Status: Active Grant

• Current Assignee: VAT Holding AG (VAT Group AG)
• Original Assignee: VAT Holding AG (VAT Group AG)
• Inventors: Fischer, Richard
• Granted Patent: US 8,141,847 B2
• Time in Patent Office: Days
• US Class Current: 137/14
• CPC Class Codes: F16K 3/18 by movement of the closure members
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations
• CPC Class Codes: Y10T 137/0324 With control of flow by a condition or characteristic of a fluid
• CPC Class Codes: Y10T 137/0396 Involving pressure control

Abstract

A method for controlling or regulating a vacuum valve that includes a valve body (1) with a valve opening (2), a closing member (3), an actuator (5) for moving the closing member (3), and a control device (9) by which the actuator (5) is triggered and by which the pressing force acting on the elastic seal (4) in the closed position of the closing member (3) is set. The setting of the pressing force acting on the elastic seal (4) is performed as a function of at least one parameter that can be input by a user.

Claims

1. Method for controlling or regulating a vacuum valve, comprising:

providing a valve body with a valve opening, a closing member that can be moved between an open position and a closed position for closing the vacuum valve and that closes the valve opening in the closed position, wherein at least one elastic seal is pressed with a pressing force onto a seal face, an actuator for moving the closing member, and a control device by which the actuator is triggered and by which the pressing force acting on the elastic seal in the closed position of the closing member is set, and

setting the pressing force acting on the elastic seal face as a function of at least one parameter that can be input by a user.

7. Method according to claim 1, wherein the setting of the pressing force acting on the elastic seal is realized as a function of a type of at least one process gas coming in contact with the elastic seal.

8. Method according to claim 7, wherein the type of process gas can be input by the user.

2. Method for controlling or regulating a vacuum valve, comprising:

providing a valve body with a valve opening, a closing member that can be moved between an open position and a closed position for closing the vacuum valve and that closes the valve opening in the closed position, wherein at least one elastic seal is pressed with a pressing force onto a seal face, an actuator for moving the closing member, and a control device by which the actuator is triggered and by which the pressing force acting on the elastic seal in the closed position of the closing member is set, and

setting the pressing force acting on the elastic seal as a function of at least one parameter that represents one of at least two possible configurations of the vacuum valve or one of at least two possible operating modes of the vacuum valve.

3. Method according to claim 2, wherein at least one process mode and one service mode are provided as operating modes, and in the service mode, a higher pressing force acting on the elastic seal is set by the control device than in the process mode.

4. Method according to claim 2, wherein an input is performed by the user for selecting between the two or more operating modes, with the setting of the pressing force acting on the elastic seal being performed as a function of the input.

5. Method according to claim 2, wherein the pressing force acting on the elastic seal is set as a function of a construction of the elastic seal or the closing member, wherein at least two different constructions of at least one of the elastic seals or closing members are used.

6. Method according to claim 5, wherein an input can be performed by the user for selecting between the two or more different constructions of at least one of the elastic seal or the closing member, with the setting of the pressing force acting on the elastic seal being performed as a function of this input.