Substrate temperature control by using liquid controlled multizone substrate support
First Claim
1. A substrate support useful in a reaction chamber of a plasma processing apparatus, the substrate support comprising:
- a base member;
a heat transfer member overlying the base member, the heat transfer member having multiple zones including at least a first zone with a first flow passage therein and a second zone with a second flow passage therein through which a liquid can be circulated to individually heat and cool the first and second zones of the heat transfer member;
an electrostatic chuck overlying the heat transfer member, the electrostatic chuck having a support surface for supporting a substrate in a reaction chamber of the plasma processing apparatus;
a source of cold liquid and a source of hot liquid in fluid communication with the first and second flow passages;
a valve arrangement operable to independently control temperature of the liquid in the first and second zones by adjusting a mixing ratio of the hot liquid to the cold liquid circulating in the first and second flow passages;
a controller controlling the valve arrangement to independently control the temperature in the first and second zones by adjusting the mixing ratio of the hot liquid to the cold liquid in the first and second flow passages.
1 Assignment
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Accused Products
Abstract
A substrate support useful in a reaction chamber of a plasma processing apparatus is provided. The substrate support comprises a base member and a heat transfer member overlying the base member. The heat transfer member has multiple zones to individually heat and cool each zone of the heat transfer member. An electrostatic chuck overlies the heat transfer member. The electrostatic chuck has a support surface for supporting a substrate in a reaction chamber of the plasma processing apparatus. A source of cold liquid and a source of hot liquid are in fluid communication with flow passages in each zone. A valve arrangement is operable to independently control temperature of the liquid by adjusting a mixing ratio of the hot liquid to the cold liquid circulating in the flow passages. In another embodiment, heating elements along a supply line and transfer lines heat a liquid from a liquid source before circulating in the flow passages.
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Citations
20 Claims
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1. A substrate support useful in a reaction chamber of a plasma processing apparatus, the substrate support comprising:
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a base member; a heat transfer member overlying the base member, the heat transfer member having multiple zones including at least a first zone with a first flow passage therein and a second zone with a second flow passage therein through which a liquid can be circulated to individually heat and cool the first and second zones of the heat transfer member; an electrostatic chuck overlying the heat transfer member, the electrostatic chuck having a support surface for supporting a substrate in a reaction chamber of the plasma processing apparatus; a source of cold liquid and a source of hot liquid in fluid communication with the first and second flow passages; a valve arrangement operable to independently control temperature of the liquid in the first and second zones by adjusting a mixing ratio of the hot liquid to the cold liquid circulating in the first and second flow passages; a controller controlling the valve arrangement to independently control the temperature in the first and second zones by adjusting the mixing ratio of the hot liquid to the cold liquid in the first and second flow passages. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A substrate support useful in a reaction chamber of a plasma processing apparatus, the substrate support comprising:
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a base member; a heat transfer member overlying the base member, the heat transfer member having a first zone with a first flow passage and a second zone with a second flow passage, wherein the flow passages are adapted to circulate a liquid to individually heat and cool each zone of the heat transfer member; a first common line in fluid communication with the first flow passage; a second common line in fluid communication with the second flow passage; a first valve in fluid communication with the first common line and a first supply line from a hot liquid source, the first valve operable to control an amount of flow of a hot liquid from the hot liquid source through the first common line; a second valve in fluid communication with the first common line and a second supply line from a cold liquid source, the second valve operable to control an amount of flow of a cold liquid from the cold liquid source through the first common line; a third valve in fluid communication with the second common line and the first supply line from the hot liquid source, the third valve operable to control an amount of flow of the hot liquid through the second common line; a fourth valve in fluid communication with the second common line and the second supply line from the cold liquid source, the fourth valve operable to control an amount of flow of the cold liquid through the second common line; a controller operable to independently control; (a) the first valve and the second valve to adjust a first mixing ratio of the hot liquid to the cold liquid to the first flow passage; and (b) the third valve and the fourth valve to adjust a second mixing ratio of the hot liquid to the cold liquid to the second flow passage; and an electrostatic chuck overlying the heat transfer member, the electrostatic chuck having a support surface for supporting a substrate in a reaction chamber of the plasma processing apparatus. - View Dependent Claims (15, 16, 17)
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18. A substrate support useful in a reaction chamber of a plasma processing apparatus, the substrate support comprising:
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a base member; a heat transfer member overlying the base member, the heat transfer member having a first zone with a first flow passage and a second zone with a second flow passage, wherein the flow passages are adapted to circulate a liquid to individually heat and cool each zone of the heat transfer member; a supply line in fluid communication with the first flow passage and a liquid source; a first heating element along the supply line, the first heating element adapted to heat the liquid flowing from the liquid source to a first temperature before the liquid is circulated in the first flow passage; a first transfer line in fluid communication with the first flow passage and the second flow passage, the first transfer line adapted to flow the liquid from the first flow passage to the second flow passage; a second heating element along the first transfer line, the second heating element adapted to heat the liquid to a second temperature before circulating in the second flow passage; a controller controlling each heating element to independently control the temperature of each zone by adjusting power to each heating element; and an electrostatic chuck overlying the heat transfer member, the electrostatic chuck having a support surface for supporting a substrate in a reaction chamber of the plasma processing apparatus. - View Dependent Claims (19, 20)
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Specification