ARRAY SUBSTRATE INCLUDING THIN FILM TRANSISTOR AND METHOD OF FABRICATING THE SAME

• US 20100117090A1
• Filed: 06/17/2009
• Published: 05/13/2010
• Est. Priority Date: 11/07/2008
• Status: Active Grant

• Current Assignee: LG Display Co., Ltd.
• Original Assignee: LG Display Co., Ltd.
• Inventors: Choi, Hee-Dong, Seo, Seong-Moh, Ahn, Byung-Chul, Lee, Jun-Min, Roh, Hyung-Gu
• Granted Patent: US 8,021,937 B2
• Time in Patent Office: Days
• US Class Current: 257/72
• CPC Class Codes: H01L 21/268 using electromagnetic radiation, e.g. laser radiation
• CPC Class Codes: H01L 27/1285 using control of the annealing or irradiation parameters, e.g. using different scanning direction or intensity for different transistors
• CPC Class Codes: H01L 27/1288 employing particular masking sequences or specially adapted masks, e.g. half-tone mask

Abstract

A method of fabricating an array substrate includes: forming a gate line and a gate electrode connected to the gate line; forming a gate insulating layer on the gate line and the gate insulting layer; sequentially forming an intrinsic amorphous silicon pattern and an impurity-doped amorphous silicon pattern on the gate insulating layer over the gate electrode; forming a data line on the gate insulating layer and source and drain electrodes on the impurity-doped amorphous silicon pattern, the data line crossing the gate line to define a pixel region, and the source and drain electrodes spaced apart from each other; removing a portion of the impurity-doped amorphous silicon pattern exposed through the source and drain electrodes to define an ohmic contact layer; irradiating a first laser beam onto the intrinsic amorphous silicon pattern through the source and drain electrode to form an active layer including a first portion of polycrystalline silicon and a second portion of amorphous silicon at both sides of the first portion; forming a passivation layer on the data line, the source electrode and the drain electrode, the passivation layer having a drain contact hole exposing the drain electrode; and forming a pixel electrode on the passivation layer in the pixel region, the pixel electrode connected to the drain electrode through the drain contact hole.

Claims

1. A method of fabricating an array substrate, comprising:

forming a gate line and a gate electrode connected to the gate line;

forming a gate insulating layer on the gate line and the gate insulting layer;

sequentially forming an intrinsic amorphous silicon pattern and an impurity-doped amorphous silicon pattern on the gate insulating layer over the gate electrode;

forming a data line on the gate insulating layer and source and drain electrodes on the impurity-doped amorphous silicon pattern, the data line crossing the gate line to define a pixel region, and the source and drain electrodes spaced apart from each other;

removing a portion of the impurity-doped amorphous silicon pattern exposed through the source and drain electrodes to define an ohmic contact layer;

irradiating a first laser beam onto the intrinsic amorphous silicon pattern through the source and drain electrode to form an active layer including a first portion of polycrystalline silicon and a second portion of amorphous silicon at both sides of the first portion;

forming a passivation layer on the data line, the source electrode and the drain electrode, the passivation layer having a drain contact hole exposing the drain electrode; and

forming a pixel electrode on the passivation layer in the pixel region, the pixel electrode connected to the drain electrode through the drain contact hole.

2. The method according to claim 1, wherein irradiating the first laser beam is performed using a solid state laser.

3. The method according to claim 2, wherein the first laser beam is emitted from a diode pumped solid state laser apparatus comprising:

a plurality of diodes emitting an infrared ray;

an yttrium aluminum garnet rod generating a second laser beam using the infrared ray;

a second-harmonic generation optic means doubling a frequency of a portion of the second laser beam to output the first laser beam of a first wavelength and the second laser beam of a second wavelength greater than the first wavelength;

a wave separation mirror splitting the first and second laser beam.

4. The method according to claim 3, wherein the first laser beam has a power within a range of about 15.4 Watt to about 16.2 Watt.

5. The method according to claim 1, further comprising annealing the active layer at a temperature of about 280°

C. to about 350°

C. for a time period of about 30 min to about 120 min.

6. The method according to claim 1, further comprising treating the active layer with a hydrogen plasma in a vacuum chamber.

7. The method according to claim 6, wherein a hydrogen gas is supplied to the vacuum chamber with a flow rate of about 1000 sccm to about 2000 sccm and the vacuum chamber has a pressure of about 10 mTorr to about 100 mTorr.

8. The method according to claim 6, wherein treating the active layer with the hydrogen plasma is performed for about 2 min to about 4.5 min.

9. The method according to claim 1, wherein sequentially forming the intrinsic amorphous silicon pattern and the impurity-doped amorphous silicon pattern and forming the data line, the source electrode and the drain electrode are performed through a single mask process.

10. An array substrate for a display device, comprising:

a substrate;

a gate line and a data line on the substrate, the gate line crossing the data line to define a pixel region;

a thin film transistor connected to the gate line and the data line, the thin film transistor including an active layer having a first region and a second region at both sides of the first region, the first region including intrinsic polycrystalline silicon, and the second region including intrinsic amorphous silicon; and

a pixel electrode in the pixel region and connected to the thin film transistor.

11. The substrate according to claim 10, wherein the thin film transistor further includes a gate electrode connected to the gate line, an ohmic contact layer on the active layer, a source electrode connected to the data line and a drain electrode spaced apart from the source electrode, wherein the ohmic contact layer including impurity-doped amorphous silicon, and the first region exposed through the source and drain electrodes.

12. The substrate method according to claim 11, further comprising:

a gate insulating layer on the gate line and the gate electrode; and

a passivation layer on the data line, the source electrode and the drain electrode, wherein the passivation layer has a drain contact hole exposing the drain electrode and the pixel electrode is connected to the drain electrode through the drain contact hole.