SEMICONDUCTOR DEVICE AND METHOD FOR THE PRODUCTION OF A SEMICONDUCTOR DEVICE
First Claim
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1. A semiconductor device comprising:
- a semiconductor body;
a drift region of a first conductivity type;
at least one trench extending into the drift region;
at least one gate electrode;
a field plate in at least a portion of the at least one trench; and
a dielectric material, wherein the dielectric material at least partially surrounds the gate electrode and the field plate;
wherein the field plate comprises a first semiconducting material.
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Abstract
In one embodiment, a field effect transistor has a semiconductor body, a drift region of a first conductivity type and a gate electrode. At least one trench extends into the drift region. A field plate is arranged at least in a portion of the at least one trench. A dielectric material at least partially surrounds both the gate electrode and the field plate. The field plate includes a first semiconducting material.
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Citations
25 Claims
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1. A semiconductor device comprising:
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a semiconductor body; a drift region of a first conductivity type; at least one trench extending into the drift region; at least one gate electrode; a field plate in at least a portion of the at least one trench; and a dielectric material, wherein the dielectric material at least partially surrounds the gate electrode and the field plate; wherein the field plate comprises a first semiconducting material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A semiconductor device comprising:
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a semiconductor body; a drift region of a first conductivity type; at least one trench extending into the drift region; at least one gate electrode; a field plate in at least a portion of the at least one trench, the field plate comprising a first semiconducting material that is at least partially of a second conductivity type, the second conductivity type that is complementary to the first conductivity type; and a dielectric material at least partially surrounding the gate electrode and the field plate. - View Dependent Claims (20, 21, 22, 23)
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24. A field effect transistor comprising:
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a semiconductor body; a drift region of a first conductivity type; at least one trench extending into the drift region; at least one gate electrode; a field plate in at least a portion of the at least one trench; and a dielectric material, wherein the dielectric material at least partially surrounds the gate electrode and the field plate; wherein the field plate comprises a first semiconducting material.
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25. A method comprising:
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providing a semiconductor body, a drift region of a first conductivity type, at least one trench extending into the drift region, at least one gate electrode, and a field plate comprising a first semiconducting material in at least a portion of the at least one trench; and depositing a dielectric material such that it at least partially surrounds the gate electrode and the field plate.
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Specification