Interface structure of wafer test equipment
First Claim
1. A wafer test equipment system, comprising:
- a performance board connected to a tester head of a tester;
a universal block printed circuit board positioned on the performance board, directly connecting a plurality of normal signal lines to a probe card and dividing each of a plurality of power signal lines into multiple paths and connecting them to the probe card;
a cable assembly transferring the normal signal lines and the power signal lines between the universal block printed circuit board and the tester head, the cable assembly soldered directly to the universal block printed circuit board in a perpendicular direction through a center portion of the performance board; and
a probe card that is removably secured to the performance board including the universal block printed circuit board, the probe card including an interposer on an upper surface thereof, a ceramic multi-layer substrate positioned below the interposer, and a plurality of needles positioned below the ceramic multi-layer substrate on a lower surface thereof opposite the upper surface.
1 Assignment
0 Petitions
Accused Products
Abstract
A wafer test equipment system includes a performance board connected to a tester head of a tester. A universal block printed circuit board is positioned on the performance board, directly connecting a plurality of normal signal lines to a probe card and dividing each of a plurality of power signal lines into multiple paths and connecting them to the probe card. A cable assembly transfers the normal signal lines and the power signal lines between the universal block printed circuit board and the tester head. The cable assembly is soldered directly to the universal block printed circuit board in a perpendicular direction through a center portion of the performance board. A probe card is removably secured to the performance board including the universal block printed circuit board. The probe card includes an interposer on an upper surface thereof, a ceramic multi-layer substrate positioned below the interposer, and a plurality of needles positioned below the ceramic multi-layer substrate on a lower surface thereof opposite the upper surface.
-
Citations
13 Claims
-
1. A wafer test equipment system, comprising:
-
a performance board connected to a tester head of a tester; a universal block printed circuit board positioned on the performance board, directly connecting a plurality of normal signal lines to a probe card and dividing each of a plurality of power signal lines into multiple paths and connecting them to the probe card; a cable assembly transferring the normal signal lines and the power signal lines between the universal block printed circuit board and the tester head, the cable assembly soldered directly to the universal block printed circuit board in a perpendicular direction through a center portion of the performance board; and a probe card that is removably secured to the performance board including the universal block printed circuit board, the probe card including an interposer on an upper surface thereof, a ceramic multi-layer substrate positioned below the interposer, and a plurality of needles positioned below the ceramic multi-layer substrate on a lower surface thereof opposite the upper surface. - View Dependent Claims (2, 3, 4, 5, 6, 8, 9, 10, 11, 12, 13)
-
-
7. The wafer test equipment system of claim 7, wherein the probe card further comprises a support surrounding the ceramic multi-layer substrate;
- and wherein the levers of the ZIF connector are positioned on the support.
Specification