SYSTEMS AND METHODS FOR CHARGED DEVICE MODEL ELECTROSTATIC DISCHARGE TESTING
First Claim
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1. A method of testing an integrated circuit device, the method comprising:
- measuring a first electrostatic discharge signal from a charged transmission path;
measuring a second electrostatic discharge signal from the charged transmission path and a charged integrated circuit device coupled with the charged transmission path; and
determining a charged device model (CDM) waveform based upon the first and second electrostatic discharge signals.
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Abstract
Systems and methods for testing an integrated circuit device using transmission path and charged device model electrostatic discharge testing. The method includes measuring a electrostatic discharge signal from a charged transmission path of the system, measuring a electrostatic discharge signal from the charged transmission path of the system and a charged integrated circuit device coupled with the charged transmission path, and determining a charged device model waveform based upon distinctions between these electrostatic discharge signals.
14 Citations
20 Claims
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1. A method of testing an integrated circuit device, the method comprising:
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measuring a first electrostatic discharge signal from a charged transmission path; measuring a second electrostatic discharge signal from the charged transmission path and a charged integrated circuit device coupled with the charged transmission path; and determining a charged device model (CDM) waveform based upon the first and second electrostatic discharge signals. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A system to test an integrated circuit device, the system comprising:
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a first electrically conductive plate in electrical communication with electrical ground and configured to support the integrated circuit device; a second electrically conductive plate in electrical communication with the electrical ground; a probe pin in electrical communication with a transmission path to electrically communicate with the integrated circuit device; a support arm operable to electrically couple the probe pin to the integrated circuit device and to support the second electrically conductive plate and the probe pin; and a controller coupled with the probe pin and support arm, the controller configured to charge the transmission path of the system, discharge the transmission path, and measure a first electrostatic discharge signal, to move the support arm to electrically couple the integrated circuit device with the transmission path, charge the transmission path and the integrated circuit device, discharge the transmission path and the integrated circuit device, and measure a second electrostatic discharge signal from which the first electrostatic discharge signal can be removed to determine a charged device model (CDM) waveform. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification