OZONE GAS CONCENTRATION MEASUREMENT METHOD, OZONE GAS CONCENTRATION MEASUREMENT SYSTEM, AND SUBSTRATE PROCESSING APPARATUS

• US 20100119439A1
• Filed: 11/05/2009
• Published: 05/13/2010
• Est. Priority Date: 11/07/2008
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: SHINDOU, Takehiro
• Granted Patent: US 8,497,132 B2
• Time in Patent Office: Days
• US Class Current: 423/581
• CPC Class Codes: C01B 13/10 Preparation of ozone
• CPC Class Codes: C01B 13/11 by electric discharge
• CPC Class Codes: C01B 2201/62 Air
• CPC Class Codes: Y10T 436/206664 Ozone or peroxide

Abstract

An ozone gas concentration measurement method that can easily measure the concentration of ozone gas. A process gas containing ozone gas is produced from a raw gas containing oxygen gas. The number of moles of gas molecules contained in the process gas is measured. The concentration of the ozone gas contained in the process gas is calculated based on the number of moles of gas molecules contained in the process gas.

Claims

1. An ozone gas concentration measurement method comprising:

a producing step of producing a produced gas containing ozone gas from a raw gas containing oxygen gas;

a measurement step of measuring the number of moles of gas molecules contained in the produced gas; and

a calculation step of calculating a concentration of the ozone gas contained in the produced gas based on the number of moles of gas molecules contained in the produced gas.

2. An ozone gas concentration measurement method as claimed in claim 1, wherein

in said measurement step, a flow rate of the produced gas is measured, and

in said calculation step, a rate of change in flow rate from the raw gas to the produced gas is calculated.

3. An ozone gas concentration measurement method as claimed in claim 2, wherein

prior to said producing step, a relationship between the rate of change in flow rate and the concentration of the ozone gas contained in the produced gas is calculated, and

in said calculation step, the concentration of the ozone gas is calculated based on the relationship.

4. An ozone gas concentration measurement system comprising:

a producing unit adapted to produce a produced gas containing ozone gas from a raw gas containing oxygen gas;

a measurement unit adapted to measure the number of moles of gas molecules contained in the produced gas; and

a calculation unit adapted to calculate a concentration of the ozone gas contained in the produced gas based on the number of moles of gas molecules contained in the produced gas.

5. An ozone gas concentration measurement system as claimed in claim 4, wherein

said measurement unit is adapted to measure a flow rate of the produced gas;

and

said calculation unit is adapted to calculate a rate of change in flow rate from the raw gas to the produced gas.

6. An ozone gas concentration measurement system as claimed in claim 5, wherein said calculation unit is adapted to calculate in advance a relationship between the rate of change in flow rate and the concentration of the ozone gas contained in the produced gas, and calculate the concentration of the ozone gas based on the relationship.

7. A substrate processing apparatus including an ozone gas concentration measurement system as claimed in claim 4.