System and Method for Forming a Thin-Film Phosphor Layer for Phosphor-Converted Light Emitting Devices
First Claim
Patent Images
1. A method of forming a thin-film phosphor layer for use in a light emitting device, the method comprising:
- transporting, using a carrier gas, a phosphor powder from a source of the phosphor powder to a deposition chamber; and
depositing the phosphor powder adjacent to a substrate within the deposition chamber so as to substantially uniformly distribute the phosphor powder adjacent to a surface of the substrate.
2 Assignments
0 Petitions
Accused Products
Abstract
A thin-film phosphor layer can be formed by an improved deposition method involving: (1) forming a phosphor powder layer that is substantially uniformly deposited on a substrate surface; and (2) forming a polymer binder layer to fill gaps among loosely packed phosphor particles, thereby forming a substantially continuous layer of thin film.
-
Citations
26 Claims
-
1. A method of forming a thin-film phosphor layer for use in a light emitting device, the method comprising:
-
transporting, using a carrier gas, a phosphor powder from a source of the phosphor powder to a deposition chamber; and depositing the phosphor powder adjacent to a substrate within the deposition chamber so as to substantially uniformly distribute the phosphor powder adjacent to a surface of the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
-
11. A method of forming a thin-film phosphor layer for use in a light emitting device, the method comprising:
-
forming a first phosphor powder layer adjacent to a substrate, the first phosphor powder layer including first phosphor particles that are distributed adjacent to a surface of the substrate; and forming, via vapor deposition, a first polymer layer adjacent to the first phosphor powder layer, the first polymer layer serving as a binder for the first phosphor particles. - View Dependent Claims (12, 13, 14, 15, 16)
-
-
17. A system to form a thin-film phosphor layer on a substrate, the system comprising:
-
a deposition subsystem defining an enclosure to accommodate the substrate; a phosphor powder delivery subsystem configured to deliver, using a carrier gas, a phosphor powder from a source of the phosphor powder to the deposition subsystem; a polymer precursor delivery subsystem configured to deliver polymer precursors in a vapor phase to the deposition subsystem; and a control subsystem connected to the deposition subsystem, the phosphor powder delivery subsystem, and the polymer precursor delivery subsystem, wherein the control subsystem is configured to control the phosphor powder delivery subsystem to deliver the phosphor powder to the deposition subsystem for a first time interval to form a phosphor powder layer adjacent to the substrate, and the control subsystem is configured to control the polymer precursor delivery subsystem to deliver the polymer precursors to the deposition subsystem for a second time interval to form a polymer layer adjacent to the phosphor powder layer. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24)
-
-
25. A thin-film phosphor layer, comprising:
-
at least one phosphor layer; and at least one parylene-based polymer layer disposed adjacent to the at least one phosphor layer, the at least one parylene-based polymer layer serving as a binder for the at least one phosphor layer. - View Dependent Claims (26)
-
Specification