LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME
First Claim
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1. A method of manufacturing a liquid crystal display device comprising:
- forming a gate wiring over an insulating surface by using a first mask;
forming a common electrode over the insulating surface;
forming an insulating film over the gate wiring and the common electrode;
forming a first amorphous semiconductor film over the insulating film;
forming a second amorphous semiconductor film containing an impurity element which imparts n-type conductivity, over the first amorphous semiconductor film;
forming a conductive film over the second amorphous semiconductor film;
patterning the first amorphous semiconductor film, the second amorphous semiconductor film and the conductive film together by using a second mask;
removing a portion of the first amorphous semiconductor film, a portion of the second amorphous semiconductor film and a portion of the conductive film to form a source region and a drain region after patterning the first amorphous semiconductor film, the second amorphous semiconductor film and the conductive film; and
forming a pixel electrode electrically connected to the conductive film,wherein the portion of the second amorphous semiconductor film is between the source region and the drain region, andwherein the pixel electrode and the common electrode are disposed so that liquid crystal molecules are controlled by an electric field produced between the pixel electrode and the common electrode.
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Abstract
In a liquid crystal display device of an IPS system, to realize reduction of manufacturing cost and improvement of yield by decreasing the number of steps for manufacturing a TFT. A channel etch type bottom gate TFT structure, where patterning of a source region and a drain region and patterning of a source wiring and a pixel electrode are carried out by the same photomask.
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Citations
28 Claims
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1. A method of manufacturing a liquid crystal display device comprising:
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forming a gate wiring over an insulating surface by using a first mask; forming a common electrode over the insulating surface; forming an insulating film over the gate wiring and the common electrode; forming a first amorphous semiconductor film over the insulating film; forming a second amorphous semiconductor film containing an impurity element which imparts n-type conductivity, over the first amorphous semiconductor film; forming a conductive film over the second amorphous semiconductor film; patterning the first amorphous semiconductor film, the second amorphous semiconductor film and the conductive film together by using a second mask; removing a portion of the first amorphous semiconductor film, a portion of the second amorphous semiconductor film and a portion of the conductive film to form a source region and a drain region after patterning the first amorphous semiconductor film, the second amorphous semiconductor film and the conductive film; and forming a pixel electrode electrically connected to the conductive film, wherein the portion of the second amorphous semiconductor film is between the source region and the drain region, and wherein the pixel electrode and the common electrode are disposed so that liquid crystal molecules are controlled by an electric field produced between the pixel electrode and the common electrode. - View Dependent Claims (2, 3, 4, 5, 21, 25)
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6. A method of manufacturing a liquid crystal display device comprising:
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forming a gate wiring over an insulating surface by using a first mask; forming a common electrode over the insulating surface; forming an insulating film over the gate wiring and the common electrode; forming a first amorphous semiconductor film over the insulating film; forming a second amorphous semiconductor film containing an impurity element which imparts n-type conductivity, over the first amorphous semiconductor film; forming a conductive film over the second amorphous semiconductor film; patterning the first amorphous semiconductor film, the second amorphous semiconductor film and the conductive film together by using a second mask; and removing a portion of the first amorphous semiconductor film, a portion of the second amorphous semiconductor film and a portion of the conductive film to form a source region, a drain region, a source wiring and a pixel electrode after patterning the first amorphous semiconductor film, the second amorphous semiconductor film and the conductive film, wherein the portion of the second amorphous semiconductor film is between the source region and the drain region, wherein the portion of the conductive film is between the source wiring and the pixel electrode, and wherein the pixel electrode and the common electrode are disposed so that liquid crystal molecules are controlled by an electric field produced between the pixel electrode and the common electrode. - View Dependent Claims (7, 8, 9, 10, 22, 26)
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11. A method of manufacturing a liquid crystal display device comprising:
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forming a gate wiring over an insulating surface by using a first mask; forming a common electrode over the insulating surface; forming an insulating film over the gate wiring and the common electrode; forming a first amorphous semiconductor film over the insulating film; forming a second amorphous semiconductor film containing an impurity element which imparts n-type conductivity, over the first amorphous semiconductor film; forming a conductive film over the second amorphous semiconductor film; patterning the first amorphous semiconductor film, the second amorphous semiconductor film and the conductive film together by using a second mask; removing a portion of the first amorphous semiconductor film, a portion of the second amorphous semiconductor film and a portion of the conductive film to form a source region and a drain region by using a third mask after patterning the first amorphous semiconductor film, the second amorphous semiconductor film and the conductive film; and forming a pixel electrode electrically connected to the conductive film, wherein the portion of the second amorphous semiconductor film is between the source region and the drain region, and wherein the pixel electrode and the common electrode are disposed so that liquid crystal molecules are controlled by an electric field produced between the pixel electrode and the common electrode. - View Dependent Claims (12, 13, 14, 15, 23, 27)
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16. A method of manufacturing a liquid crystal display device comprising:
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forming a gate wiring over an insulating surface by using a first mask; forming a common electrode over the insulating surface; forming an insulating film over the gate wiring and the common electrode; forming a first amorphous semiconductor film over the insulating film; forming a second amorphous semiconductor film containing an impurity element which imparts n-type conductivity, over the first amorphous semiconductor film; forming a conductive film over the second amorphous semiconductor film; patterning the first amorphous semiconductor film, the second amorphous semiconductor film and the conductive film together by using a second mask; and removing a portion of the first amorphous semiconductor film, a portion of the second amorphous semiconductor film and a portion of the conductive film to form a source region, a drain region, a source wiring and a pixel electrode by using a third mask after patterning the first amorphous semiconductor film, the second amorphous semiconductor film and the conductive film, wherein the portion of the second amorphous semiconductor film is between the source region and the drain region, wherein the portion of the conductive film is between the source wiring and the pixel electrode, and wherein the pixel electrode and the common electrode are disposed so that liquid crystal molecules are controlled by an electric field produced between the pixel electrode and the common electrode. - View Dependent Claims (17, 18, 19, 20, 24, 28)
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Specification