Rotation rate sensor
First Claim
1. A rotation rate sensor, comprising:
- a mounting device;
a first drive frame having a drive, wherein the drive is configured to set the first drive frame into a first oscillatory motion along an axis of oscillation relative to the mounting device, the axis of oscillation being in non-parallel alignment with an inner surface framed by the first drive frame;
at least one first stator electrode;
at least one first actuator electrode coupled to the first drive frame in such a way that, in a rotary motion of the rotation rate sensor due to a Coriolis force, the at least one first actuator electrode is displaced in a first deflection direction relative to the at least one first stator electrode; and
an evaluation device configured to (a) determine a value of a voltage applied between the at least one first stator electrode and the at least one first actuator electrode, and (b) specify information regarding the rotary motion of the rotation rate sensor while taking the determined value of the voltage into account.
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Accused Products
Abstract
A rotation rate sensor includes: a mounting device; a first drive frame having a drive, which is designed to set the first drive frame into a first oscillatory motion along an axis of oscillation relative to the mounting device; a first stator electrode; a first actuator electrode coupled to the first drive frame in such a way that in a rotary motion of the rotation rate sensor due to a Coriolis force, the first actuator electrode being displaceable in a first deflection direction relative to the first stator electrode; and an evaluation device configured to determine a voltage applied between the first stator electrode and the first actuator electrode, and to specify information regarding the rotary motion of the rotation rate sensor while taking the determined voltage value into account.
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Citations
10 Claims
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1. A rotation rate sensor, comprising:
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a mounting device; a first drive frame having a drive, wherein the drive is configured to set the first drive frame into a first oscillatory motion along an axis of oscillation relative to the mounting device, the axis of oscillation being in non-parallel alignment with an inner surface framed by the first drive frame; at least one first stator electrode; at least one first actuator electrode coupled to the first drive frame in such a way that, in a rotary motion of the rotation rate sensor due to a Coriolis force, the at least one first actuator electrode is displaced in a first deflection direction relative to the at least one first stator electrode; and an evaluation device configured to (a) determine a value of a voltage applied between the at least one first stator electrode and the at least one first actuator electrode, and (b) specify information regarding the rotary motion of the rotation rate sensor while taking the determined value of the voltage into account. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification