MICROMECHANICAL COMPONENT
First Claim
1. A micromechanical component for detecting an acceleration, comprising:
- a conductive layer having a first and a second electrode; and
a rotatable flywheel mass in the form of a rocker having a first and a second lever arm, the first lever arm being situated opposite the first electrode, and the second lever arm being situated opposite the second electrode, the first lever arm having a first hole structure having a number of first cut-outs, the second lever arm having a second hole structure having a number of second cut-outs, and the first and second lever arms having different masses;
wherein outer dimensions of the first and second lever arms correspond, and the first hole structure of the first lever arm differs from the second hole structure of the second lever arm.
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Accused Products
Abstract
A micromechanical component for detecting an acceleration. The component includes a conductive layer having a first and a second electrode and a rotatable flywheel mass in the form of a rocker having a first and a second lever arm. The first lever arm is situated opposite the first electrode, and the second lever arm is situated opposite the second electrode. The first lever arm has a first hole structure having a number of first cut-outs, and the second lever arm has a second hole structure having a number of second cut-outs. The first and the second lever arm have different masses. The component is characterized by the fact that the outer dimensions of the first and second lever arms correspond, and the first hole structure of the first lever arm differs from the second hole structure of the second lever arm. Furthermore, a method for manufacturing such a micromechanical component is provided.
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Citations
12 Claims
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1. A micromechanical component for detecting an acceleration, comprising:
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a conductive layer having a first and a second electrode; and a rotatable flywheel mass in the form of a rocker having a first and a second lever arm, the first lever arm being situated opposite the first electrode, and the second lever arm being situated opposite the second electrode, the first lever arm having a first hole structure having a number of first cut-outs, the second lever arm having a second hole structure having a number of second cut-outs, and the first and second lever arms having different masses; wherein outer dimensions of the first and second lever arms correspond, and the first hole structure of the first lever arm differs from the second hole structure of the second lever arm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for manufacturing a micromechanical component for detecting an acceleration, comprising:
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providing a substrate; forming an insulating layer on the substrate; forming a patterned conductive layer on the insulating layer having a first and a second electrode; forming a sacrificial layer on the conductive layer; forming a patterned functional layer on the sacrificial layer for a rotatable flywheel mass in the form of a rocker having a first and a second lever arm, the first lever arm having a first hole structure having a number of first cut-outs and the second lever arm having a second hole structure having a number of second cut-outs, the first and the second lever arm having different masses; and removing the sacrificial layer, the flywheel mass being exposed and the first lever arm being situated opposite the first electrode, and the second lever arm being situated opposite the second electrode; wherein the patterned functional layer is formed in such a manner that outer dimensions of the first and second lever arms correspond, and the first hole structure of the first lever arm differs from the second hole structure of the second lever arm. - View Dependent Claims (10, 11, 12)
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Specification