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ITO-coated article for use with touch panel display assemblies, and/or method of making the same

  • US 20100122900A1
  • Filed: 11/18/2008
  • Published: 05/20/2010
  • Est. Priority Date: 11/18/2008
  • Status: Active Grant
First Claim
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1. A method of making a coated article, the method comprising:

  • providing a substantially transparent substrate;

    sputtering a substantially sub-oxidized indium tin oxide (ITO) and/or metallic-mode indium-tin film, directly or indirectly, on the substrate via an indium-tin (InSn) target, said sputtering being performed at or close to room temperature; and

    heat treating the substrate with the substantially sub-oxidized ITO and/or metallic-mode indium-tin film such that the layer of substantially sub-oxidized ITO and/or metallic-mode indium-tin film is transformed into a substantially transparent and electrically conductive crystalline resultant ITO film.

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