SEMICONDUCTOR COMPONENT AND METHOD OF MANUFACTURE
First Claim
1. A method for manufacturing a semiconductor component, comprising:
- providing a semiconductor material having first and second major surfaces;
forming a plurality of trenches in the semiconductor material, wherein a first trench of the plurality of trenches has at least one sidewall;
forming a first layer of dielectric material over the plurality of trenches;
forming a first layer of polysilicon in a first portion of a first trench of the plurality of trenches;
planarizing the first layer of polysilicon to form a first polysilicon electrode in the first portion of a first trench of the plurality of trenches, the first polysilicon electrode having opposing sides;
recessing the first polysilicon electrode;
forming a second layer of dielectric material over the first polysilicon electrode that has been recessed;
forming a second layer of polysilicon over the second layer of dielectric material and over first polysilicon electrode that has been recessed; and
planarizing the second layer of polysilicon to form a second polysilicon electrode over the first polysilicon electrode that has been recessed, wherein polysilicon is substantially absent over the first major surface.
1 Assignment
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Accused Products
Abstract
A semiconductor component that includes gate electrodes and shield electrodes and a method of manufacturing the semiconductor component. A semiconductor material has a device region, a gate contact region, a termination region, and a drain contact region. One or more device trenches is formed in the device region and one or more termination trenches is formed in the edge termination region. Shielding electrodes are formed in portions of the device trenches that are adjacent their floors. A gate dielectric material is formed on the sidewalls of the trenches in the device region and gate electrodes are formed over and electrically isolated from the shielding electrodes. The gate electrodes in the trenches in the device region are connected to the gate electrodes in the trenches in the gate contact region. The shielding electrodes in the trenches in the device region are connected to the shielding electrodes in the termination region.
44 Citations
20 Claims
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1. A method for manufacturing a semiconductor component, comprising:
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providing a semiconductor material having first and second major surfaces; forming a plurality of trenches in the semiconductor material, wherein a first trench of the plurality of trenches has at least one sidewall; forming a first layer of dielectric material over the plurality of trenches; forming a first layer of polysilicon in a first portion of a first trench of the plurality of trenches; planarizing the first layer of polysilicon to form a first polysilicon electrode in the first portion of a first trench of the plurality of trenches, the first polysilicon electrode having opposing sides; recessing the first polysilicon electrode; forming a second layer of dielectric material over the first polysilicon electrode that has been recessed; forming a second layer of polysilicon over the second layer of dielectric material and over first polysilicon electrode that has been recessed; and planarizing the second layer of polysilicon to form a second polysilicon electrode over the first polysilicon electrode that has been recessed, wherein polysilicon is substantially absent over the first major surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method for manufacturing a semiconductor component, comprising:
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providing a semiconductor material of a first conductivity type having first and second surfaces; forming a plurality of trenches in the semiconductor material, each trench of the plurality of trenches having a floor and sidewalls; forming a first layer of dielectric material over at least the floors and sidewalls of the plurality of trenches; forming a first layer of polysilicon over the first layer of dielectric material; planarizing the first layer of polysilicon; removing a first portion of the first layer of polysilicon that is in at least a first trench of the plurality of trenches; forming a second layer of dielectric material in the first trench; forming a second layer of polysilicon over the second layer of dielectric material; and planarizing the second layer of polysilicon, wherein a portion of the second layer of polysilicon remains in at least the first trench and wherein polysilicon from at least the second layer of polysilicon is absent over the first surface. - View Dependent Claims (14, 15, 16, 17)
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18. A semiconductor component, comprising:
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a semiconductor material of a first conductivity type and having first and second major surfaces; a plurality of trenches in the semiconductor material, wherein first and second trenches of the plurality of trenches extend from the first major surface into the semiconductor material, and wherein the first and second trenches have floors and sidewalls; a first layer of dielectric material on the floors and sidewalls of the first and second trenches; first and second shielding electrodes on the first layer of dielectric material in the first and second trenches, respectively; a second layer of dielectric material on the first and second shielding electrodes; a gate oxide on the second layer of dielectric material and on the sidewalls of the first and second trenches; first and second polysilicon gate electrodes on the gate oxide in the first and second trenches, respectively, wherein polysilicon is absent above the first major surface; a first doped region of a second conductivity type extending into a portion of the semiconductor material that is between the first and second trenches; and a second doped region of the first conductivity type extending into a portion of the first doped region. - View Dependent Claims (19, 20)
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Specification