MICROELECTROMECHANICAL GYROSCOPE WITH ROTARY DRIVING MOTION AND IMPROVED ELECTRICAL PROPERTIES
First Claim
1. An integrated microelectromechanical structure, comprising:
- a die including a substrate and a frame, the frame defining a detection region and having a first side extending along a first axis of a plane that includes a second axis;
elastic anchorage elements;
a driving mass anchored to said substrate via the elastic anchorage elements, set in said detection region, and configured to be rotated in the plane with a movement of actuation about a third axis transverse to the plane;
elastic supporting elements; and
a first pair and a second pair of first sensing masses, suspended inside, and respectively coupled to, said driving mass, via the elastic supporting elements so as to be fixed with respect to the driving mass in said movement of actuation and perform a detection movement of rotation out of said plane in response to a rotation of the structure at a first angular velocity;
said first pair and said second pair being aligned in respective directions having non-zero inclinations of opposite sign with respect to said first axis.
1 Assignment
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Accused Products
Abstract
An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.
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Citations
23 Claims
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1. An integrated microelectromechanical structure, comprising:
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a die including a substrate and a frame, the frame defining a detection region and having a first side extending along a first axis of a plane that includes a second axis; elastic anchorage elements; a driving mass anchored to said substrate via the elastic anchorage elements, set in said detection region, and configured to be rotated in the plane with a movement of actuation about a third axis transverse to the plane; elastic supporting elements; and a first pair and a second pair of first sensing masses, suspended inside, and respectively coupled to, said driving mass, via the elastic supporting elements so as to be fixed with respect to the driving mass in said movement of actuation and perform a detection movement of rotation out of said plane in response to a rotation of the structure at a first angular velocity;
said first pair and said second pair being aligned in respective directions having non-zero inclinations of opposite sign with respect to said first axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An electronic device comprising:
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an integrated microelectromechanical structure, further comprising; a die including a substrate and a frame, the frame defining a detection region and having a first side extending along a first axis of a plane that includes a second axis; elastic anchorage elements; a driving mass anchored to said substrate via the elastic anchorage elements, set in said detection region, and configured to be rotated in the plane with a movement of actuation about a third axis transverse to the plane; elastic supporting elements; and a first pair and a second pair of first sensing masses, suspended inside, and respectively coupled to, said driving mass, via the elastic supporting elements so as to be fixed with respect to the driving mass in said movement of actuation and perform a detection movement of rotation out of said plane in response to a rotation of the structure at a first angular velocity;
said first pair and said second pair being aligned in respective directions having non-zero inclinations of opposite sign with respect to said first axis; anda read stage, operatively coupled to said structure. - View Dependent Claims (15, 16, 17, 18, 19)
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20. A method of forming an integrated microelectromechanical structure, comprising:
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forming a die having a substrate and a frame having a first side extending along a first axis of a plane that includes a second axis; forming a detection region in the frame; forming elastic anchorage elements; anchoring a driving mass to the substrate via the elastic anchorage elements in the detection region, the driving mass configured to be rotated in a plane with a movement of actuation about a third axis transverse to the plane; forming elastic supporting elements; and forming a first pair and a second pair of first sensing masses, suspended inside, and respectively coupled to, the driving mass via the elastic supporting elements so as to be fixed with respect to the driving mass in the movement of actuation and perform a detection movement of rotation out of the plane in response to a rotation of the structure at a first angular velocity;
the first pair and the second pair being aligned in respective directions having non-zero inclinations of opposite sign with respect to the first axis. - View Dependent Claims (21, 22, 23)
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Specification