INERTIA FORCE SENSOR
First Claim
1. An inertial force sensor arranged to detecting an acceleration of an object, said inertial force sensor comprising:
- a weight having a first surface and a second surface which are opposite to each other along a first axis;
a first fixing portion linked to the weight;
a second fixing portion linked to the weight via the first fixing portion, the second fixing portion being arranged to be fixed to the object;
a first substrate having a surface facing the first surface of the weight;
a first opposed electrode unit includinga first electrode on the first surface of the weight, anda second electrode on the surface of the first substrate and facing the first electrode, wherein the first opposed electrode unit has a capacitance between the first electrode and the second electrode to detect the acceleration based on the capacitance between the first electrode and the second electrode;
a first elastic portion elastically deforming so as to displace the weight along a second axis perpendicular to the first axis but not along any of the first axis and a third axis perpendicular to the first axis and the second axis; and
a second elastic portion elastically deforming so as to displace the first fixing portion along the third axis but not along any of the first axis and the second axis.
1 Assignment
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Accused Products
Abstract
An inertial force sensor includes a weight, a first fixing portion linked to the weight, a second fixing portion linked to the weight via the first fixing portion, a first electrode on a first surface of the weight, a second electrode facing the first electrode, and first and second elastic portions elastically deforming so as to displace the weight. The first elastic portion displaces the weight along an X-axis but not along any of a Y-axis and a Z-axis. The second elastic portion displaces the first fixing portion along the Y-axis but not along any of the X-axis and the Z-axis. This inertial force sensor detects an acceleration at high sensitivity.
37 Citations
22 Claims
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1. An inertial force sensor arranged to detecting an acceleration of an object, said inertial force sensor comprising:
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a weight having a first surface and a second surface which are opposite to each other along a first axis; a first fixing portion linked to the weight; a second fixing portion linked to the weight via the first fixing portion, the second fixing portion being arranged to be fixed to the object; a first substrate having a surface facing the first surface of the weight; a first opposed electrode unit including a first electrode on the first surface of the weight, and a second electrode on the surface of the first substrate and facing the first electrode, wherein the first opposed electrode unit has a capacitance between the first electrode and the second electrode to detect the acceleration based on the capacitance between the first electrode and the second electrode; a first elastic portion elastically deforming so as to displace the weight along a second axis perpendicular to the first axis but not along any of the first axis and a third axis perpendicular to the first axis and the second axis; and a second elastic portion elastically deforming so as to displace the first fixing portion along the third axis but not along any of the first axis and the second axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification