APPARATUS FOR CONVEYING A WASTE STREAM

• US 20100126605A1
• Filed: 07/19/2007
• Published: 05/27/2010
• Est. Priority Date: 08/08/2006
• Status: Active Grant

• Current Assignee: Edwards Limited (Atlas Copco AB)
• Original Assignee: Edwards Limited (Atlas Copco AB)
• Inventors: Stones, Ian David
• Granted Patent: US 8,684,031 B2
• Time in Patent Office: Days
• US Class Current: 137/565.230
• CPC Class Codes: C23C 14/56 Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
• CPC Class Codes: C23C 14/564 Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
• CPC Class Codes: C23C 16/4412 Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
• CPC Class Codes: C23C 16/54 Apparatus specially adapted for continuous coating
• CPC Class Codes: Y10T 137/8593 Systems
• CPC Class Codes: Y10T 137/86083 Vacuum pump
• CPC Class Codes: Y10T 137/86163 Parallel

Abstract

Apparatus for conveying waste streams exhausted from first and second chambers is provided. The apparatus comprises first conduit means comprising an inlet for receiving a waste stream exhausted from the first chamber, and an outlet, and a second conduit means comprising an inlet for receiving a waste stream exhausted from a second chamber, and an outlet. The outlets of the first and second conduit means are connected together. The first conduit means comprises means for generating sonic choking of gas being conveyed towards the outlet of the first conduit means in order to inhibit migration of a component of the waste stream exhausted from the second chamber towards the first chamber.

Claims

1. Apparatus for conveying waste streams exhausted from first and second chambers, the apparatus comprising:

first conduit comprising an inlet for receiving a waste stream exhausted from the first chamber, and an outlet; and

second conduit comprising an inlet for receiving a waste stream exhausted from a second chamber, and an outlet, wherein the outlets of the first conduit and second conduit are in fluid communication;

characterised in that the first conduit comprises means for locally reducing the cross sectional area of part of the first conduit to increase the local density of gas being conveyed towards the outlet of the first conduit to an extent which inhibits migration of a component of the waste stream exhausted from the second chamber towards the first chamber.

2. The apparatus according to claim 1 wherein the means for locally reducing the cross sectional area of part of the first conduit comprises a flow restrictor.

3. The apparatus according to claim 2 wherein the flow restrictor is an aperture plate.

4. The apparatus according to claim 2 wherein the first conduit comprises a gas port located upstream of the flow restrictor and means for delivering purge gas to the gas port.

5. The apparatus according to claim 4 wherein the purge gas is nitrogen.

6. The apparatus according to claim 4 wherein the purge gas is argon.

7. The apparatus according to claim 4 wherein the component of the waste stream comprises a gaseous component.

8. The apparatus according to claim 7 wherein the gaseous component is a light gas.

9. The apparatus according to claim 8 wherein the gaseous component is hydrogen.

10. The apparatus according to claim 8 wherein the gaseous component is helium.

11. The apparatus according to claim 1 wherein the component of the waste stream is a vapour component.

12. The apparatus according to claim 1 wherein the component of the waste stream is a solid component.

13. The apparatus according to claim 1 comprising a common exhaust conduit for receiving the waste stream from the first conduit and the second conduit.

19. The apparatus according to claim 4 wherein the component of the waste stream is a vapour component.

20. The apparatus according to claim 4 wherein the component of the waste stream is a solid component.

14. A pumping arrangement comprising:

first conduit comprising an inlet for receiving a waste stream exhausted from the first chamber, and an outlet; and

second conduit comprising an inlet for receiving a waste stream exhausted from a second chamber, and an outlet, wherein the outlets of the first conduit and second conduit are in fluid communication;

characterised in that the first conduit comprises means for locally reducing the cross sectional area of part of the first conduit to increase the local density of gas being conveyed towards the outlet of the first conduit to an extent which inhibits migration of a component of the waste stream exhausted from the second chamber towards the first chamber;

a first vacuum pump for evacuating the first chamber and having an outlet connected to the inlet of the first conduit; and

a second vacuum pump for evacuating the second chamber and having an outlet connected to the inlet of the second conduit.

15. The pumping arrangement according to claim 14 wherein the first vacuum pump and the second vacuum pump are secondary vacuum pumps.

16. The pumping arrangement according to claim 15 wherein the secondary vacuum pumps are turbomolecular vacuum pumps.

17. The pumping arrangement according to claim 14 comprising a primary pump connected to the outlets of the first conduit and the second conduit.

18. The pumping arrangement according to claim 14 wherein the first vacuum pump and the second vacuum pump are each primary pumps.