PCB Droplet Actuator Fabrication
First Claim
1. A method of manufacturing a droplet actuator for conducting droplet operations, the method comprising:
- (a) positioning a dielectric material between a first metal layer configured to include an electrode and a second metal layer configured to include an interconnect pad; and
(b) forming a connection between the first and second metal layers.
1 Assignment
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Accused Products
Abstract
Alternative approaches to fabricating printed circuit boards for use in droplet actuator operations are provided. In one embodiment, a method of manufacturing a droplet actuator for conducting droplet operations includes positioning a dielectric material between a first metal layer configured to include an electrode and a second metal layer configured to include an interconnect pad. The method additionally includes forming a connection between the first and second metal layers. Droplet actuators and methods of fabricating and supporting printed circuit boards of droplet actuators are also provided.
160 Citations
26 Claims
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1. A method of manufacturing a droplet actuator for conducting droplet operations, the method comprising:
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(a) positioning a dielectric material between a first metal layer configured to include an electrode and a second metal layer configured to include an interconnect pad; and (b) forming a connection between the first and second metal layers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. The method of 20 further comprising forming the first plate.
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22. A droplet actuator for conducting droplet operations, comprising:
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(a) a first plate that includes; (i) a first metal layer comprising an electrode; (ii) a second metal layer comprising an interconnect pad; (iii) a dielectric material positioned between the first and second metal layers; and (iv) a via connecting the electrode to the interconnect; and (b) a second plate proximate the first plate and forming a gap therebetween that provides a fluid flow path for the droplet operations. - View Dependent Claims (23, 24, 25)
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26. A method of fabricating and supporting a printed circuit board of a droplet actuator for conducting droplet operations, the method comprising:
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(a) providing a core printed circuit board by positioning a dielectric material between a first metal layer configured to include an electrode and a second metal layer configured to include an interconnect pad; (b) applying a photoresist layer onto the first metal layer and forming one or more openings in the dielectric material and the second metal layer; (c) applying a photoresist layer onto the second metal layer and plating the one or more openings to form one or more blind vias, thereby forming a connection between the first and second metal layers; (d) stripping the photoresist layer from both the first metal layer and the second metal layer; (e) patterning the features on both the first metal layer and the second metal layer; (f) applying an electrowetting dielectric layer to the first metal layer; and (g) bonding a rigid support structure to the second metal layer.
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Specification