SEMICONDUCTOR-ON-INSULATOR (SOI) DEVICES USING VOID SPACES
First Claim
1. A semiconductor device, comprising:
- a semiconductor substrate;
a first device isolation layer extending straight in a first direction on the semiconductor substrate;
a second device isolation layer extending straight in a second direction perpendicular to the first direction on the semiconductor substrate;
an active semiconductor layer spaced apart from the semiconductor substrate and extending upward a thickness from the semiconductor substrate in fin-type;
a void space defined by the first device isolation layer and the second device isolation layer in a substantially horizontal direction and defined by the semiconductor substrate and the active semiconductor layer in a substantially vertical direction;
a gate electrode extending in a second direction on the first device isolation and the active semiconductor layer, and in contact with the upper surface and both sides of the active semiconductor layer;
a channel at least on both sides of the active semiconductor layer; and
a source/drain within the active semiconductor layer at both sides of the gate electrode.
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Accused Products
Abstract
An SOI substrate is fabricated by providing a substrate having a sacrificial layer thereon, an active semiconductor layer on the sacrificial layer remote from the substrate and a supporting layer that extends along at least two sides of the active semiconductor layer and the sacrificial layer and onto the substrate, and that exposes at least one side of the sacrificial layer. At least some of the sacrificial layer is etched through the at least one side thereof that is exposed by the supporting layer to form a void space between the substrate and the active semiconductor layer, such that the active semiconductor layer is supported in spaced-apart relation from the substrate by the supporting layer. The void space may be at least partially filled with an insulator lining.
34 Citations
20 Claims
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1. A semiconductor device, comprising:
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a semiconductor substrate; a first device isolation layer extending straight in a first direction on the semiconductor substrate; a second device isolation layer extending straight in a second direction perpendicular to the first direction on the semiconductor substrate; an active semiconductor layer spaced apart from the semiconductor substrate and extending upward a thickness from the semiconductor substrate in fin-type; a void space defined by the first device isolation layer and the second device isolation layer in a substantially horizontal direction and defined by the semiconductor substrate and the active semiconductor layer in a substantially vertical direction; a gate electrode extending in a second direction on the first device isolation and the active semiconductor layer, and in contact with the upper surface and both sides of the active semiconductor layer; a channel at least on both sides of the active semiconductor layer; and a source/drain within the active semiconductor layer at both sides of the gate electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A semiconductor device, comprising:
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a substrate; a first device isolation layer extending in a first direction on the substrate; a second device isolation layer extending in a second direction on the substrate; an active layer spaced apart from the substrate and extending upward a thickness from the substrate in fin-type; a void space defined by the first device isolation layer and the second device isolation layer in a substantially horizontal direction and defined by the substrate and the active layer in a substantially vertical direction; a gate electrode extending in a second direction on the first device isolation and the active layer; a channel at least on both sides of the active layer; and a source/drain within the active layer at both sides of the gate electrode. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification