TRANSPARENT ELECTRODE
First Claim
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1. A transparent electrode comprising a transparent conductive film, wherein the extinction coefficient of the transparent conductive film at a wavelength of 1.55 μ
- m is equal to or less than 0.5.
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Abstract
To provide a transparent electrode having high infrared light transmittance that is used in an optical communication device using infrared light, particularly infrared light near 1.55 μm, the transparent electrode of the present invention includes a transparent conductive film, and the extinction coefficient of the transparent conductive film at a wavelength of 1.55 μm is equal to or less than 0.5.
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19 Claims
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1. A transparent electrode comprising a transparent conductive film, wherein the extinction coefficient of the transparent conductive film at a wavelength of 1.55 μ
- m is equal to or less than 0.5.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
- 18. A method for producing a transparent conductive film, the method comprising depositing a transparent conductive film by use of a sputtering process in a sputtering atmosphere satisfying the condition that the ratio of the flow rate of O2 gas to the flow rate of rare gas is equal to or greater than 3.0×
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