FIXING APPARATUS FOR A PROBE CARD
First Claim
1. A fixing apparatus for fixing a probe card to a holder a, whereinthe probe card is provided stretchably with respect to the holder in a direction substantially parallel to a main surface of the probe card, and the probe card is bound onto the holder in a direction substantially perpendicular to the main surface of the probe card.
2 Assignments
0 Petitions
Accused Products
Abstract
A fixing apparatus for fixing a probe card to a holder includes a screw fixed to the holder and binding the probe card onto the holder in a vertical direction, a first bearing member intervening between a head of the screw and the probe card and allowing expansion and contraction of the probe card with respect to the screw in a horizontal direction, and a second bearing member intervening between the probe card and the holder and allowing expansion and contraction of the probe card with respect to the holder in the horizontal direction.
25 Citations
8 Claims
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1. A fixing apparatus for fixing a probe card to a holder a, wherein
the probe card is provided stretchably with respect to the holder in a direction substantially parallel to a main surface of the probe card, and the probe card is bound onto the holder in a direction substantially perpendicular to the main surface of the probe card.
Specification