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PROTECTION LAYERS FOR MEDIA PROTECTION DURING FABRICATION OF PROBE MEMORY DEVICE

  • US 20100127727A1
  • Filed: 09/30/2008
  • Published: 05/27/2010
  • Est. Priority Date: 09/30/2008
  • Status: Active Grant
First Claim
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1. An apparatus, comprising:

  • a cantilever wafer having a plurality of cantilever probes for scanning a media layer;

    a mover wafer comprising the media layer;

    a bond ring connected to the cantilever wafer; and

    a germanium layer and a silicon dioxide layer between the bond ring and the mover wafer.

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